Abstract
Polycrystalline rutile films are synthesized on fused quartz substrates by the method of thermal oxidation of a titanium metal layer in air at 800°C. The optical parameters of the TiO 2 films are determined for a wavelength of λ = 0.6328 µm by the method of laser zero ellipsometry.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 15–20, May, 2006.
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Ayupov, B.M., Atuchin, V.V., Grigor’eva, T.I. et al. Optical characteristics of thin rutile films on fused quartz substrates. Russ Phys J 49, 468–474 (2006). https://doi.org/10.1007/s11182-006-0128-3
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DOI: https://doi.org/10.1007/s11182-006-0128-3