SpringerLink
Log in

High temperature stability of electrically conductive Pt–Rh/ZrO2 and Pt–Rh/HfO2 nanocomposite thin film electrodes

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Nanocomposite films made up of either Pt–Rh/ZrO2 or Pt–Rh/HfO2 materials were co-deposited using multiple e-beam evaporation sources onto langasite (La3Ga5SiO14) substrates, both as blanket films and as patterned interdigital transducer electrodes for surface acoustic wave sensor devices. The films and devices were tested after different thermal treatments in a tube furnace up to 1,200 °C. X-ray diffraction and electron microscopy results indicate that Pt–Rh/HfO2 films are stabilized by the formation of monoclinic HfO2 precipitates after high temperature exposure, which act as pinning sites to retard grain growth and prevent agglomeration of the conductive cubic Pt–Rh phase. The Pt–Rh/ZrO2 films were found to be slightly less stable, and contain both tetragonal and monoclinic ZrO2 precipitates that also helps prevent Pt–Rh agglomeration. Film conductivities were measured versus temperature for Pt–Rh/HfO2 films on a variety of substrates, and it was concluded that La and/or Ga diffusion from the langasite substrate into the nanocomposite films is detrimental to film stability. An Al2O3 diffusion barrier grown on langasite using atomic layer deposition was found to be more effective than a SiAlON barrier layer in minimizing interdiffusion between the nanocomposite film and the langasite crystal at temperatures above 1,000 °C.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  • Aita CR, Wiggins MD, Whig R, Scanlan CM (1996) Thermodynamics of tetragonal zirconia formation in a nanolaminate film. J Appl Phys 79:1176–1178

    Article  Google Scholar 

  • Canabal A, Davulis PM, Harris GM, Pereira da Cunha M (2010) High-temperature battery-free wireless microwave acoustic resonator sensor system. Electron Lett 46:471–472

    Article  Google Scholar 

  • Courbat J, Briand D, de Rooij NF (2008) Reliability improvement of suspended platinum-based micro-heating elements. Sens Actuators A 142:284–291

    Article  Google Scholar 

  • Davulis PM, Pereira da Cunha M (2012) Determination and experimental verification of high-temperature SAW orientations on langatate. IEEE Trans Ultr Ferr Freq Contr 59:287–411

    Article  Google Scholar 

  • Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of high-temperature degradation of platinum thin films with in situ resistance measurement apparatus. J. Microelectromech Syst 7:128–135

    Article  Google Scholar 

  • Frankel DJ, Bernhardt GP, Sturtevant BT, Moonlight T, Pereira da Cunha M, Lad RJ (2008) Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments. Proc IEEE Sensors 82–85

  • Garvie RC (1978) Stabilization of the tetragonal structure in zirconia monocrystals. J Phys Chem 82:218–224

    Article  Google Scholar 

  • Gregory OJ, You T (2005) Ceramic temperature sensors for harsh environments. IEEE Sens J 5:833–838

    Article  Google Scholar 

  • Gusev EP, Narayanan V, Frank MM (2006) Advanced high-к dielectric stacks with poly Si and metal gates: recent progress and current challenges. IBM J Res Dev 50:387–410

    Article  Google Scholar 

  • Hoppe EE, Aita CR (2007) Initial phases in sputter deposited HfO2-Al2O3 nanolaminate films. Appl Phys Lett 91:203105

    Article  Google Scholar 

  • Huang H, Nakamura M, Su P, Fasching R, Saito Y, Prinz FB (2007) High-performance ultrathin solid oxide fuel cells for low-temperature operation. J Electrochem Soc 154:B20–B24

    Article  Google Scholar 

  • Hunter GW, Neudeck PG, Okojie RS, Beheim GM, Powell JA (2003) An overview of high temperature electronics and sensor development at NASA Glenn Research Center. J. Turbomachinery 125:658–664

    Article  Google Scholar 

  • Kerman K, Lai BK, Ramanathan S (2011) Pt/Y0.16Zr0.84O1.92/Pt thin film solid oxide fuel cells: electrode microstructure and stability considerations. J Power Sources 196:2608–2614

    Article  Google Scholar 

  • Lee KN, Lee DS, Jung SW, Jang YH, Kim YK, Seong WK (2009) A high-temperature MEMS heater using suspended silicon structures. J Micromech Microeng 19:115011–115018

    Article  Google Scholar 

  • Mailly F, Giani A, Bonnot R, Temple-Boyer P, Pascal-Delannoy F, Foucaran A, Boyer A (2001) Anemometer with hot platinum thin film. Sens Actuators A 94:32–38

    Article  Google Scholar 

  • Miyakawa N, Legner W, Ziemann T, Telitschkin D, Fecht H-J, Friedberger A (2012) MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1000°C. Microsyst Techn 18:1077–1087

    Article  Google Scholar 

  • Moulzolf SC, Lad RJ (2000) Diffraction studies of cubic phase stability in undoped zirconia thin films. J Mater Res 15:369–376

    Article  Google Scholar 

  • Moulzolf SC, Frankel DJ, Bernhardt GP, Nugent B, Lad RJ (2011) Thin film electrodes and passivation coatings for harsh environment microwave acoustic sensors. Proc SPIE: Smart Sens, Actuators, MEMS V 8066:806606

    Article  Google Scholar 

  • Okojie RS, Spry D, Krotine J, Salupo C, Wheeler DR (2000) Stable Ti/TaSi2/Pt Ohmic contacts on n-type 6H-SiC epilayer at 600°C in air. Proc Mat Res Soc 622–628

  • Pereira da Cunha M, Moonlight T, Lad RJ, Bernhardt G, Frankel DJ (2007) Enabling very high temperature acoustic wave devices for sensor & frequency control applications. Proc. IEEE Ultrasonics 2107–2110

  • Pereira da Cunha M, Moonlight T, Lad RJ, Frankel DJ, Bernhardt G (2008) High temperature sensing technology for applications up to 1000°C. Proc IEEE Sensors 752–755

  • Pereira da Cunha M, Lad RJ, Moonlight T, Moulzolf SC, Canabal A, Behanan R, Davulis PM, Frankel DJ, Bernhardt G, Pollard T, McCann DF (2011) Recent advances in harsh environment acoustic wave sensors for contemporary applications. Proc IEEE Sensors 614–617

  • Puurunen RL (2005) Surface chemisty of atomic layer deposition: a case study of the trimethlyaluminium process. J Appl Phys 97:121301

    Article  Google Scholar 

  • Schofield MA, Aita CR, Rice PM, Gajdardziska-Josifovska M (1998) Transmission electron microscopy study of zirconia-alumina nanoalminates grown by reactive sputter deposition. Part II: transformation behavior of tetragonal zirconia nanocrystallites. Thin Solid Films 326:117–125

    Article  Google Scholar 

  • Semancik S, Cavicchi RE, Wheeler MC, Tiffany JE, Poirier GE, Walton RM, Suehle JS, Panchapakesan B, DeVoe DL (2001) Microhotplate platforms for chemical sensor research. Sens Actuators B 77:579–591

    Article  Google Scholar 

  • Spannhake J, Schulz O, Helwig A, Krenkow A, Müller G, Doll T (2006) High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater material. Sensors 6:405–419

    Article  Google Scholar 

  • Sturtevant BT, Pereira da Cunha M, Lad RJ (2013) Properties of SiAlO2N protective coatings on surface acoustic wave devices. Thin Solid Films 534:198–204

    Article  Google Scholar 

  • Thompson CV (2012) Solid-state dewetting of thin films. Annu Rev Mater Res 42:399–434

    Article  Google Scholar 

  • Tiggelaar RM, Sanders RGP, Groenland AW, Gardeniers JGE (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sens Actuators A 152:39–47

    Article  Google Scholar 

  • Zhu X, Zhu J, Li A, Liu Z, Ming N (2009) Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks. J Mater Sci Technol 25:289–313

    Article  Google Scholar 

Download references

Acknowledgments

The authors are grateful to George Bernhardt and Michael Call for technical assistance. This work was supported by the U.S. Department of Energy, Award #: DE-FE0007379TDD. This report was prepared as an account of work sponsored by an agency of the United States Government. Neither the United States Government nor any agency thereof, nor any of their employees, makes any warranty, express or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise does not necessarily constitute or imply its endorsement, recommendation, or favoring by the United States Government or any agency thereof. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Government or any agency thereof.

Author information

Authors and Affiliations

  1. Laboratory for Surface Science & Technology, University of Maine, Orono, ME, 04469, USA

    Scott C. Moulzolf, David J. Frankel, Mauricio Pereira da Cunha & Robert J. Lad

  2. Department of Electrical & Computer Engineering, University of Maine, Orono, ME, 04469, USA

    Mauricio Pereira da Cunha

  3. Department of Physics and Astronomy, University of Maine, Orono, ME, 04469, USA

    Robert J. Lad

Authors
  1. Scott C. Moulzolf
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. David J. Frankel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Mauricio Pereira da Cunha
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Robert J. Lad
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Robert J. Lad.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Moulzolf, S.C., Frankel, D.J., Pereira da Cunha, M. et al. High temperature stability of electrically conductive Pt–Rh/ZrO2 and Pt–Rh/HfO2 nanocomposite thin film electrodes. Microsyst Technol 20, 523–531 (2014). https://doi.org/10.1007/s00542-013-1974-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-013-1974-x

Keywords

Search

Navigation