SpringerLink
Log in

Nanostructure evolution in cluster-assembled WO x films synthesized by radio-frequency assisted laser ablation

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

We deposited WO x films by radio frequency assisted pulsed laser deposition (RF-PLD). We explored the roles of substrate temperature and ambient gas pressure-composition on film nanostructure to maximise the film surface area in view of gas sensing applications. A W target was ablated in highly reactive O2 at 5 Pa and 700 Pa, as well as in a mixed oxygen-helium atmosphere at 700 Pa. Corning glass was used as the substrate, at increasing temperatures. Process parameters such as laser fluence and wavelength, radio-frequency power, target to substrate distance were kept fixed. The influence of the deposition parameters on roughness, morphology, nanostructure, and bond coordination of the deposited films were studied by Atomic Force Microscopy, Scanning Electron Microscopy, Transmission Electron Microscopy, and micro-Raman spectroscopy. Nanoparticle formation, the development of an extended, open nanostructure and its evolution toward compact films are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P.V. Ashirt, G. Bader, V. Truong, Thin Solid Films 320, 324 (1998)

    Article  ADS  Google Scholar 

  2. R. Moos, R. Muller, C. Plog, A. Knezevic, H. Leye, E. Irion, T. Braun, K. Marquardt, K. Binder, Sens. Actuators B: Chem. 83, 181 (2002)

    Article  Google Scholar 

  3. X.-L. Yang, W.-L. Dai, R. Dao, H. Chen, H. Li, Y. Cao, F. Kangnian, J. Mol. Catal. A: Chem. 241, 205 (2005)

    Article  Google Scholar 

  4. P.M. Ossi, in Laser-Surface Interactions for New Materials Production, ed. by A. Miotello, P.M. Ossi (Springer, Berlin, 2010), p. 99

    Chapter  Google Scholar 

  5. P.M. Ossi, A. Bailini, Appl. Phys. A 93, 645 (2008)

    Article  ADS  Google Scholar 

  6. L. Maillé, C. Sant, C. Le Paven-Thivet, C. Legrand-Buscema, P. Garnier, Thin Solid Films 428, 237 (2003)

    Article  ADS  Google Scholar 

  7. N.M.G. Parreira, N.J.M. Carvalho, A. Cavaleiro, Thin Solid Films 510, 191 (2006)

    Article  ADS  Google Scholar 

  8. R. Sivakumar, R. Gopalakrishnan, M. Jayachandran, C. Sanjeeviraja, Opt. Mater. 29, 679 (2007)

    Article  ADS  Google Scholar 

  9. G.J. Fang, Z.L. Liu, G.C. Sun, K.L. Yao, Phys. Status Solidi (a) 184, 129 (2001)

    Article  ADS  Google Scholar 

  10. Y. Suda, H. Kawasaki, T. Ohshima, Y. Yagyuu, Thin Solid Films 516, 4397 (2008)

    Article  ADS  Google Scholar 

  11. M. Filipescu, S. Orlando, V. Russo, A. Lamperti, A. Purice, A. Moldovan, M. Dinescu, Appl. Surf. Sci. 253, 8258 (2007)

    Article  ADS  Google Scholar 

  12. M. Filipescu, P.M. Ossi, M. Dinescu, Appl. Surf. Sci. 254, 1347 (2007)

    Article  ADS  Google Scholar 

  13. M. Filipescu, P.M. Ossi, N. Santo, M. Dinescu, Appl. Surf. Sci. 255, 9699 (2009)

    Article  ADS  Google Scholar 

  14. A. Bailini, P.M. Ossi, Appl. Surf. Sci. 252, 4364 (2006)

    Article  ADS  Google Scholar 

  15. M.S. Tillack, D.W. Blair, S.S. Harilal, Nanotechnol. 15, 390 (2004)

    Article  ADS  Google Scholar 

  16. D. Sibold, H.M. Urbassek, Phys. Rev. A 43, 6722 (1991)

    Article  ADS  Google Scholar 

  17. A. Bailini, P.M. Ossi, Europhys. Lett. 79, 35002 (2007)

    Article  ADS  Google Scholar 

  18. J. Gonzalo, A. Perea, D. Babonneau, C.N. Afonso, N. Beer, J.-P. Barnes, A.K. Petford-Long, D.E. Hole, P.D. Townsend, Phys. Rev. B 71, 125420 (2005)

    Article  ADS  Google Scholar 

  19. E. Cazzanelli, C. Vinegoni, G. Mariotto, A. Kuzmin, G. Purans, J. Solid State Chem. 143, 24 (1999)

    Article  ADS  Google Scholar 

  20. M. Boulova, G. Lucazeau, J. Solid State Chem. 167, 425 (2002)

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. CIMA, Università degli Studi, Milano, Italy

    N. Santo

  2. National Institute for Laser, Plasma and Radiation Physics, P.O. Box MG 16, 77125, Magurele, Bucharest, Romania

    M. Filipescu & M. Dinescu

  3. Dip. Chimica, Materiali, Ingegneria Chimica & Centre for NanoEngineered Materials and Surfaces—NEMAS, Politecnico di Milano, Milano, Italy

    P. M. Ossi

Authors
  1. N. Santo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Filipescu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. M. Ossi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Dinescu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Filipescu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Santo, N., Filipescu, M., Ossi, P.M. et al. Nanostructure evolution in cluster-assembled WO x films synthesized by radio-frequency assisted laser ablation. Appl. Phys. A 101, 325–331 (2010). https://doi.org/10.1007/s00339-010-5825-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-010-5825-7

Keywords

Search

Navigation