Abstract
This paper presents an overview of the issues related to the integration of carbon nanotubes into microelectronics systems. Particular emphasis is placed on the use of carbon nanotubes as on-chip wiring (interconnects) and active devices (transistors), the two main building blocks of current semiconductor circuits. The properties of state-of-the art devices are compared in order to test the viability of replacing silicon-based components with carbon nanotubes. Further, the problems associated with the construction of nanotube-based devices are discussed.
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73.63.Fg; 81.07.De; 85.35.Kt; 81.16.Hc
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Graham, A., Duesberg, G., Hoenlein, W. et al. How do carbon nanotubes fit into the semiconductor roadmap?. Appl. Phys. A 80, 1141–1151 (2005). https://doi.org/10.1007/s00339-004-3151-7
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DOI: https://doi.org/10.1007/s00339-004-3151-7