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Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode

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Abstract

A micro electrochemical milling by layer process is presented in this paper. Because of no tool wear in electrochemical micromachining, a very thin tungsten electrode is used as the tool cathode. By applying ultrashort pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, the mathematical model of micro electrochemical milling by layer is established to ensure a good shape precision. Second, the micrometer scale cylindrical electrode is fabricated in situ by electrochemical etching for the production of micro structures. And then, effects of machining parameters on the side gap variation in electrochemical milling process have been studied experimentally. Finally, some 2D micro shapes and 3D complex micro structures with physical dimension of several 10 μm have been obtained.

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Acknowledgments

This work was financially supported by the Chinese National Natural Science Funds (50635040) and the National High-Tech Research and Development Program (863 Program) (2009AA04Z302).

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Authors and Affiliations

  1. Associated Engineering Research Center of Mechanics and Mechatronic Equipment, Shandong University, Weihai, 264209, China

    Yong Liu & Linsen Zhu

  2. College of Mechanical and Electrical Engineering, Nan**g University of Aeronautics and Astronautics, Nan**g, 210016, China

    Di Zhu

Authors
  1. Yong Liu
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  2. Di Zhu
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  3. Linsen Zhu
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Correspondence to Yong Liu.

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Liu, Y., Zhu, D. & Zhu, L. Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode. Int J Adv Manuf Technol 60, 977–984 (2012). https://doi.org/10.1007/s00170-011-3682-y

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  • DOI: https://doi.org/10.1007/s00170-011-3682-y

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