Abstract
Alternative technique for studying grain-boundary scattering phenomena in high-resistivity semiconducting films has been indicated. The combined effect of the presence of electric field and mechanical stress at the grain boundaries was considered. It is shown that the grain boundary potential, density of trap states, and carrier concentration of the films can be obtained by measuring reflectances of the films deposited on non-absorbing substrates.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Baccarani G, Ricco B and Spadini G 1978J. Appl. Phys. 49 5565
Bennett H E and Bennett J M 1967 inPhysics of thin films (eds) G Hass and R E Thun (New York: Academic Press) vol. 4, p. 1
Bhattacharyya D, Chaudhuri S and Pal A K 1992aVacuum 43 313
Bhattacharyya D, Bhattacharyya S K, Chaudhuri S and Pal A K 1992bVacuum 43 1201
Bhattacharyya D, Chaudhuri S and Pal A K 1993Vacuum 44 797
Bugnet P 1974Rev. Phys. Appl. 9 447
Bujatti M and Marcelja F 1972Thin Solid Films 11 249
Dow J P and Redfield D 1970Phys. Rev. B1 3358
Dow J P and Redfield D 1972Phys. Rev. B5 594
Gavrilenko V I 1987Phys. Status Solidi (b)139 457
Kamins T I 1971J. Appl. Phys. 42 4357
Klyava Y G 1985Sov. Phys. Solid State 27 816
Maiti B, Gupta P, Chaudhuri S and Pal A K 1994Thin Solid Films 239 104
Redfield D 1963Phys. Rev. 130 916
Redfield D 1965Phys. Rev. A140 2056
Seto J Y W 1975J. Electrochem. Soc. 122 701
Seto J Y W 1976J. Appl. Phys. 46 5247
Szczyrbowsky J and Czapla A 1977J. Appl. Phys. 46 127
Szczyrbowski J J 1979Phys. Status Solidi (b)105 96
Szczyrbowski J J 1981Phys. Status Solidi (b)105 515
Tuttle J R, Albin D, Matson R J and Noufi R 1989J. Appl. Phys. 66 4408
Volger J 1950Phys. Rev. 9 1023
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Pal, A.K. Grain-boundary scattering in semiconductor films. Bull. Mater. Sci. 17, 1251–1258 (1994). https://doi.org/10.1007/BF02747224
Issue Date:
DOI: https://doi.org/10.1007/BF02747224