Abstract
The development of a novel polymer-based micro robotic gripper that can be actuated in a fluidic medium is presented in this paper. Our current work is to explore new materials and designs for thermal actuators to achieve micromanipulation of live biological cells. We used parylene C to encapsulate a metal heater, resulting in effectively a tri-layered thermal actuator. Parylene C is a bio-compatible dielectric polymer that can serve as a barrier to various gases and chemicals. Therefore, it is suitable to serve as a thermal/electrical/chemical isolation material for protecting the metal heater from exposing to an aqueous environment. We have demonstrated parylene actuators (2 mm×100 μm×0.5 μm) to operate in an aqueous environment using 10 to 80 mW input power. The temperature of these actuators at full deflection was estimated to be ∼60°C, which is much lower than the typical requirement of >100°C to actuate other conventional MEMS actuators.Danio rerio follicles in fluidic medium were captured successfully using these actuators. Moreover, these actuators were found to be responsive to moderate rise in environmental temperature, and hence, we could vary the fluidic medium temperature to actuate trimorphs on a chip without any input of electrical energy, i.e., raising the fluidic temperature from 23°C to 60°C could actuate the trimorphs to grasp follicles of ∼1 mm size in diameter. At 60°C, the embryos inside the follicles were observed to be alive, i.e., they were still moving in the biological fluid isolated by the follicle membrane. The smallest follicles grasped were ∼500 μm in diameter using 800 μm×130 μm×0.6 μm actuators. The fabrication process, modeling, and optimization of the trimorph actuators are presented. Based on the successful operation of these polymer-based actuators, we are currently develo** multifinger thermal microgrippers for cellular gras** and manipulation, which can potentially be hybridly integrated with circuits for computer control.
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References
Kim DH, Kim KH, Kim KY, et al. Dexterous teleoperation for micro parts handling based on haptic/visual interface. In: Micromechatronics and Human Science, 2001. 211–217
Thompson JA, Fearing RS. Automating microassembly with ortho-tweezers and force sensing.Intelligent Robots and Systems, 2001, 3: 1327–1334
Shoji S, Esashi M. Microflow devices and systems.Journal of Micromechanics and Microengineering, 1994, 4: 157–171
Lin G, Kim CJ, Konishi S, et al. Design, fabrication and testing of a C-shape actuator. In: Tech Dig, Transducers '95, Stockholm, Sweden, 1995. 416–419
Ataka M, Omodaka A, Takeshima N, et al. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system.Journal of Microelectromechanical Systems, 1993, 2(4): 146–150
Harder TA, Yao TJ, He Q, et al. Residual stress in thin-film parylene-C. In: Proceeding of IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, USa, 2002. 435–438
Walsh K, Norville J, Tai YC. Photoresist as a sacrificial layer by dissolution in acetone. In: Proceeding of IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), 2001. 114–117
Qi WX, et al. A parylene micro check valve. In: IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), Piscataway, NJ, USA, 1999. 177–182
Incropera FP, DeWitt DP. Fundamentals of Heat and Mass Transfer, Wiley, 1996
Chan HY, Li WJ. A polymer-based micro thermal actuator for micromanipulations in aqueous environment.International Journal of Non-linear Sciences and Numerical Simulation, 2002, 3(3–4): 775–778
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The project supported by the Hong Kong Research Grants Council (CUHK4215/01)
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Chan, HY., Li, W.J. Design and fabrication of a micro thermal actuator for cellular gras**. Acta Mech Sin 20, 132–139 (2004). https://doi.org/10.1007/BF02484256
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DOI: https://doi.org/10.1007/BF02484256