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Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry

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Abstract

SIMS depth profiles of copper-nickel thin film targets were measured with argon and nitrogen primary ions. While pronounced cone formation is observed in case of argon irradiation the erosion is much more uniform with nitrogen projectiles, probably due to formation of nitride surface layers.

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Authors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, D-8046, Garching/München, Germany

    W. O. Hofer & H. Liebl

Authors
  1. W. O. Hofer
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  2. H. Liebl
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Hofer, W.O., Liebl, H. Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry. Appl. Phys. 8, 359–360 (1975). https://doi.org/10.1007/BF00898370

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  • DOI: https://doi.org/10.1007/BF00898370

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