Abstract
MEMS capacitive pressure sensor has a wide application due to its less power dependency and less sensitive to temperature changes. It also has good over- pressure tolerance. This paper focuses on sensitivity analysis of capacitive pressure sensor by plotting graphs between diaphragm displacement versus applied pressure, change in capacitance versus applied pressure at different temperatures for different materials. Sensor working principle is based on electro-mechanics interface. In this paper, capacitive pressure sensor with different structure is designed, simulated and the results are analyzed using COMSOL Multiphysics 5.5.
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Ananthi, S., Lamba, M., Chaudhary, H., Singh, K. (2023). Performance Analysis and Simulation of MEMS Capacitive Pressure Sensor. In: Dwivedi, S., Singh, S., Tiwari, M., Shrivastava, A. (eds) Flexible Electronics for Electric Vehicles. Lecture Notes in Electrical Engineering, vol 863. Springer, Singapore. https://doi.org/10.1007/978-981-19-0588-9_14
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DOI: https://doi.org/10.1007/978-981-19-0588-9_14
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