Abstract
Scanning electron microscopy (SEM) has always been an essential tool for the qualitative analysis of microstructure of any material. With the advent of SEM-based techniques like energy-dispersive spectroscopy (EDS) and electron backscatter diffraction (EBSD), extensive quantitative characterization of the microstructure of a material has also become possible. In principle, EBSD technique gathers only the crystal orientation data of each and every scanned point; however, this orientation data contains significant information in itself and it has become a transformative technique for the characterization of crystallographic materials. First and foremost, orientation information allows one to ascertain the presence and spatial distribution of various phases in a material. With the orientation data, one can easily obtain quantitative information about grain size, morphology, and phase fractions. Orientation information also allows one to extract misorientation data, which in turn provides details about various types of grain and phase boundaries in the material. Orientation data has also enabled researchers to extract micro-textural information about the material, which includes, but not limited to, pole figures and orientation distribution function (ODF). This paper will give a brief glimpse of the capability of this, now ubiquitous, technique for microstructural and textural characterization of materials.
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Acknowledgements
All the EBSD data was generated using the facilities in the Advanced Centre for Material Sciences (ACMS) of IIT Kanpur. Mr. Sivakumar assisted in EBSD data acquisition for the Inconel 718 sample. EBSD of duplex steel was acquired by Prince Setia. Saquib Abdullah, Dripta Dutta, and R. Sarvesha assisted in the EBSD data acquisition and analysis of quartz in case study (B). A part of the work in case study (B) is supported by a DST Swarnajayanti Fellowship (DST/SJF/E&ASA-01/2015-16), awarded to Santanu Misra. Case study (C) is part of the project funded by BRNS, under sanction No. 36(2)/14/39/2016-BRNS/6047.
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Shekhar, S., Sharma, N.K., Sahu, S., Misra, S. (2022). Electron Backscatter Diffraction Technique: Fundamentals to Applications. In: Biswas, K., Sivakumar, S., Gurao, N. (eds) Electron Microscopy in Science and Engineering. IITK Directions, vol 6. Springer, Singapore. https://doi.org/10.1007/978-981-16-5101-4_4
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