Abstract
The results of an experimental study of coaxial exciplex lamps pumped by various types of discharge (the longitudinal discharge, barrier discharge, or continuous glow discharge) are presented. The mixture compositions and pressures as well as the pum** pulse parameters have been optimized for the production of radiation with λ = 193, 222, 249, 308 and 350 nm. Exciplex lamps with a radiating surface area of 570, 840, and 1300 cm2 have been created. The average radiation power achieved for λ = 222 and 308 nm is up to 100 W and for λ = 350 nm is ~20 W. The application of an inductive energy store with a semiconductor opening switch being used for pum** a longitudinal-dischargebased exciplex lamp has been demonstrated.
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References
Boyunov, V.I., Volkova, G.A., and Podmoshensky, I.V. (1991) VUV Radiation pulse coaxial lamp, Zh. Priklad. Spektroskopii, 54, No 1, 164–166.
Hata.keyama, T., Kannari, F., and Obara, M. (1991) Theoretical study of vacuum ultraviolet F2 excimer lamp (157 nm) excited by microwave discharge, Appl. I’hys. Lett., 59, 387–389.
Kumagai, H. and Toyoda, K. (1991) Properties of a new high-efficiency vacuum ultraviolet fluorine lamp excited by a microwave discharge, Ibid., 59, 2811–2813.
Teylor, R.S., Leopold, K.E., and Tan, K.O. (1991) Continuous B-X excimer fluorescence using direct current discharge excitation, Ibid., 59, 525–527.
Gellert, B. and Kogelschatz, V. (1991) Generation of excimer emission in dielectric barrier discharges, Appt. Phys. B, 52, 14–21.
Koval’, B.A., Skakun, V.S., Tarasenko, V.F., Fomin, E.A., and Yankelevich, E.B. (1992) High-power wide-aperture exciplex lamp, Prib. Tekh. Eksper., No 4, 244–245.
Golovitsky, A.P. (1992) Possibilities of production of effective UV sources based on continuous glow discharge in mixtures of inert gases and halogens, Pisma Zh. Tekhn. Fiz., 18, 72–76.
Golovitsky, A.P. and Kan, S.N. (1993) Characteristics of UV excimer radiation of continuous glow low-pressure discharge, Optika i Spektroskopiya, 75, 604–609.
Boichenko, A.M., Tarasenko, V.F., Fomin, E.A., and Yakovlenko, S.I. (1993) Broadband emission continua in rare gases and in mixtures of rare gases with halides, Quant. E/ectr., 23, 3–25.
Kuznetsov, A.A., Skakun, V.S., Tarasenko, V.F., and Fomin, E.A. (1993) Excimer electro-discharge lamp with 7 = 126, 146, or 172 nm, Pisma Zh. Tekh. Fiz., 19, 15,.
Rulev, G.V. and Saenko, V.B. (1993) UV radiation generation initiated by spark discharge in mixtures of inert gases with halogens, Ibid., 19, 53–56,.
Boichenko, A.M., Skakun, V.S., Tarasenko, V.F., Fomin, E.A., and Yakovlenko, S.I. (1993) Powerful exciplex flashlamps, Laser Physics, 3, 838–843.
Volkova, G.A., Kirillova, N.N., Pavlovskaya, E.N., and Yakovleva, A.V. (1984) VUV-lamps pumped by a barrier discharge in rare gases, Z_h. Priklad Spektroskopii, 41, 681–695.
Eliasson, B. and Kogelschatz, U. (1988) UV excimer radiation from dielectric-barrier discharges, App!. Phys. B, 46, 299–303.
Kogelschatz, U. and Esrom, H. (1990) New incoherent ultraviolet excimer sources for photolotytic material deposition, Laser and Optielektronik, 22, 55–59.
Vizir’, V.A., Skakun, B.S., Smorudov, G.V., Fomin, E.A., Tarasenko, V.F,, and Chervyakov, V.V. (1995) Coaxial excilamps pumped by barrier and longitudinal discharges, Kvant. Elektr., 22, 512–522.
Skakun, V.S., Tarasenko, V.F., and Fomin, E.A. (1992) Pulsed wide-band emission sources, Zh. Prikl. Spekiroskopii, 56, 331–333.
Boichenko, A.M., Skakun, V.S., Tarasenko, V.F., Fomin, E.A., and Yakovlenko, S.I. (1993) Spatial characteristics of the emission from exciplex lapms, Quant. Elect,., 23, 532–534.
Kuznetsov, A.A., Skakun, V.S., Tarasenko, V.F., and Fomin, E.A. (1993) A pulsed source of high-power VUV spontaneous emission, Optika atmosfery t okeana, 6, 694–698.
Gerber, T., Lüthy, W., and Burkhard, P. (1980) High efficiency KrF excimer flashlamp, Opt. Commun., 35, 242–244.
Kumagai, H. and Obara, M. (1989) New high-efficiency quasi-continuous operation of KrF(B-X) excimer lamp excited by microwave discharge, App!. Phys. Lett., 54, 2619–2621.
Kumagai, H. and Obara, M. (1989) New high-efficiency quasi-continuous operation of ArF(B-X) excimer lamp excited by microwave discharge, Ibid., 55, 1583–1584.
hxcimer Lasers (1979) Ch.K. Rhodes (ed.), Springer-Verlag, Berlin, Heidelberg, New York.
Gerasimov, GN., Krylov, B.E., Loginov, A.V., and Shchukin, S.A. (1992) Ultraviolet emission of excited rare gas molecules, Usp. Fiz. Nauk, 162, 123–159.
Kotov, Yu.A., Mesyats, G.A., Rukin, S.N., and Filatov, A.L. (1993) Solid state current interrupter for powerful nanosecond pulses generation, Dokl. RAN, 330, 315–317.
Panchenko, A.N. and Tarasenko, V.F. (1990) Pum** of gas lasers by generator using inductive energy storage, Kvant. Elektron., 17, 32–34.
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Tarasenko, V.F., Lomaev, M.I., Panchenko, A.N., Skakun, V.S., Sosnin, E.A. (1996). High-Power UV Excilamps. In: Kossowsky, R., Jelinek, M., Walter, R.F. (eds) High Power Lasers — Science and Engineering. NATO ASI Series, vol 7. Springer, Dordrecht. https://doi.org/10.1007/978-94-015-8725-9_20
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DOI: https://doi.org/10.1007/978-94-015-8725-9_20
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