In-situ Analysis of Species and Transport

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Epitaxy

Part of the book series: Springer Series in MATERIALS SCIENCE ((SSMATERIALS,volume 62))

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Abstract

The analysis of the growth process is concerned with three questions:

  1. (i)

    which are the species moving towards the surface and participate in the growth

  2. (ii)

    what determines their flux to the surface and

  3. (iii)

    finally, actually the most important but also most difficult to answer question, what are the processes on the surface?

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Herman, M.A., Richter, W., Sitter, H. (2004). In-situ Analysis of Species and Transport. In: Epitaxy. Springer Series in MATERIALS SCIENCE, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-07064-2_9

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  • DOI: https://doi.org/10.1007/978-3-662-07064-2_9

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-08737-0

  • Online ISBN: 978-3-662-07064-2

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