Abstract
We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method.
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References
Schulz, G., Schwider, J.: Precise measurement of planeness. Appl. Opt. 6, 1077–1084 (1967)
Ai, C., Wyant, J.C.: Absolute testing of flats by using even and odd functions. Appl. Opt. 32, 4698–4705 (1993)
Küchel, M.F.: A new approach to solve the three flat problem. Optik 112, 381–391 (2001)
Griesmann, U.: Three-flat test solution based on simple mirror symmetry. Appl. Opt. 45, 5856–5865 (2006)
Vannoni, M., Molesini, G.: Three-flat test with plates in horizontal posture. Appl. Opt. 47, 2133–2145 (2008)
Vannoni, M., Molesini, G.: Absolute planarity with three flat test: an iterative approach with Zernike polynomials. Opt. Express 16, 340–354 (2008)
Dörband, B., Seitz, G.: Interferometric testing of optical surfaces at its current limit. Optik 112, 392–398 (2001)
Otaki, K., Yamamoto, T., Fukuda, Y.: Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror. J. Vac. Sci. Technol. B 20, 295–300 (2002)
Su, D., Miao, E., Sui, Y., Yang, H.: Absolute surface figure testing by shift-rotation method using Zernike polynomials. Opt. Letters 37, 3198–3200 (2012)
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© 2014 Springer-Verlag Berlin Heidelberg
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Zhao, W., Song, W., Wu, G., Wu, Y. (2014). Experimental Study on the Absolute Measurement of Flats. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_88
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DOI: https://doi.org/10.1007/978-3-642-36359-7_88
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-36358-0
Online ISBN: 978-3-642-36359-7
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