Quantitative Deflectometry Challenges Interferometry

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Fringe 2013

Introduction

“Phase-Measuring Deflectometry” (PMD) has been developed at Erlangen to measure spatially resolved slope data of specular surfaces [1], [2] and [3]. The principle is simple: A camera observes the image of a sinusoidal grating via reflection at the surface under test. The local slope of the sample is encoded in the deformation of the observed pattern [4]. Meanwhile, PMD is well established to control the manufacturing of aspheric eyeglasses. PMD even has the potential to challenge interferometry. This specifically, because in contrast to interferometry, PMD does not display retrace errors. We will discuss the objectives and potentials of PMD on the road to sub-micrometer accuracy, as well as new applications including machine-integrated measurements.

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References

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Olesch, E., Faber, C., Krobot, R., Zuber, R., Häusler, G. (2014). Quantitative Deflectometry Challenges Interferometry. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_170

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  • DOI: https://doi.org/10.1007/978-3-642-36359-7_170

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-36358-0

  • Online ISBN: 978-3-642-36359-7

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