Abstract
The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
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Chen, X. (2012). Advanced High Precision Control for XY-Table. In: Su, CY., Rakheja, S., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2012. Lecture Notes in Computer Science(), vol 7506. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33509-9_2
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DOI: https://doi.org/10.1007/978-3-642-33509-9_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-33508-2
Online ISBN: 978-3-642-33509-9
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