Abstract
Carbon based coatings have attracted considerable interest in a wide range of industries due to their excellent tribological properties. Nanoscale hydrogen free C/Cr coatings have been produced by unbalanced magnetron (UBM) sputtering [1]. Their structure and properties are strongly influenced by the deposition bias voltage [1–2]. The multilayer structure at −350V substrate bias is believed to be a result of phase separation and formation of a self-organised layered nanostructure in conditions of high ion irradiation and elemental diffusion [2].
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References
P.Eh. Hovsepian, Y.N. Kok, A.P. Ehiasarian, A. Erdemir, J.-G. Wen, I. Petrov. Thin Solid Films 447–448 (2004), p.7.
P.Eh. Hovsepian, Y.N. Kok, A.P. Ehiasarian, R. Haasch, J.G. Wen, I. Petrov. Surf. & Coat. Technol., 200(2005) p.1572.
We kindly acknowledge Engineering Physical Sciences Research Council, UK for funding.
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Zhou, Z., Rainforth, W.M., Gass, M., Bleloch, A., Hovsepian, P.E. (2008). (S)TEM/EELS characterisation of a multilayer C/Cr PVD coating. In: Richter, S., Schwedt, A. (eds) EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85226-1_294
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DOI: https://doi.org/10.1007/978-3-540-85226-1_294
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