Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 209))

  • 731 Accesses

Abstract

Ellipsometry, in general, determines the complex ratio ρ of linearly independent electric feld components of polarized electromagnetic plane waves. More specific, the change of the polarization state of an electromagnetic plane wave upon interaction with a sample is addressed thereby. Explicitly, for a given mode description in terms of, e.g., p and s polarized fields (amplitudes A stand for incident, B for exiting waves. Figure 2.1)1

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this chapter

Cite this chapter

Schubert, M. Ellipsometry. In: Infrared Ellipsometry on Semiconductor Layer Structures. Springer Tracts in Modern Physics, vol 209. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-44701-6_2

Download citation

  • DOI: https://doi.org/10.1007/978-3-540-44701-6_2

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-23249-0

  • Online ISBN: 978-3-540-44701-6

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

Publish with us

Policies and ethics

Navigation