Abstract
The crucial aspect of forming black silicon (b-Si) lies in develo** cost-effective and easily scalable methods for altering the surface of silicon wafers to enable mass production. Nanostructured b-Si layers can be fabricated by several different techniques, including both wet and dry etching methods.
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Ayvazyan, G. (2024). Formation of Black Silicon. In: Black Silicon. Synthesis Lectures on Materials and Optics. Springer, Cham. https://doi.org/10.1007/978-3-031-48687-6_2
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