Abstract
The vast majority of microphones that are produced each year utilize capacitive sensing either through the use of a charged electret material or an applied bias voltage. The design of these microphones, in essentially all cases, relies on simple formulas to estimate the capacitance of parallel plate electrodes. This greatly limits the designs to follow the ubiquitous parallel plate configuration, with all of its common design challenges. In an attempt to overcome this limitation, in the following we review the basic principles of sensing charge and examine a capacitive sensing geometry that overcomes several of the common limitations encountered in capacitive microphone design. Our approach follows that described in [1], which presents an electrostatic sensing scheme that results in a minimum of electrostatic force and stiffness on the moving electrode.
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References for Chapter 12
Miles R (2018) A compliant capacitive sensor for acoustics: Avoiding electrostatic forces at high bias voltages. IEEE Sens J
Zhou J, Miles RN, Towfighian S (2015) A novel capacitive sensing principle for microdevices. ASME 2015 international design engineering technical conferences and computers and information in engineering conference. American Society of Mechanical Engineers, pp V004T09A024–V004T09A024
Daeichin M, Ozdogan M, Towfighian S, Miles R (2019) Dynamic response of a tunable mems accelerometer based on repulsive force. Sens Actuators A: Phys 289:34–43
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© 2024 The Author(s), under exclusive license to Springer Nature Switzerland AG
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Miles, R.N. (2024). Estimation of Capacitance. In: Physical Approach to Engineering Acoustics. Mechanical Engineering Series. Springer, Cham. https://doi.org/10.1007/978-3-031-33009-4_12
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DOI: https://doi.org/10.1007/978-3-031-33009-4_12
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