Abstract
In this work we present the development of an integrated CMOS analog interface able to convert differential capacitive sensors variations into a DC voltage. The presented circuit is based on autobalancing bridge techniques improving its performances through the linearization of the input/output characteristic and the achievement of the full-range sensor variations capability. Comparison between theoretical and measured interface static behaviour results are reported.
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References
Baxter L (1997) Capacitive sensors. In: Capacitive sensors: design and applications. The Institute of Electrical and Electronics Engineers, New York, pp 1–46
Puers R (1993) Capacitive sensors: when and how to use them. Sens Actuators, A 37–38:93–105. https://doi.org/10.1016/0924-4247(93)80019-d
Lotters J, Olthuis W, Veltink P, Bergveld P (1999) A sensitive differential capacitance to voltage converter for sensor applications. IEEE Trans Instrum Meas 48:89–96. https://doi.org/10.1109/19.755066
**e H, Fedder G (2002) Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS. Sens Actuators, A 95:212–221. https://doi.org/10.1016/s0924-4247(01)00740-3
Pedersen T, Fragiacomo G, Hansen O, Thomsen E (2009) Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance. Sens Actuators, A 154:35–41. https://doi.org/10.1016/j.sna.2009.07.013
Zeng T, Lu Y, Liu Y, Yang H, Bai Y, Hu P et al (2016) A capacitive sensor for the measurement of departure from the vertical movement. IEEE Trans Instrum Meas 65:458–466. https://doi.org/10.1109/tim.2015.2490806
Tsuchiya T, Funabashi H (2004) A z-axis differential capacitive SOI accelerometer with vertical comb electrodes. Sens Actuators, A 116:378–383. https://doi.org/10.1016/j.sna.2004.05.008
Horenstein M, Perreault J, Bifano T (2000) Differential capacitive position sensor for planar MEMS structures with vertical motion. Sens Actuators, A 80:53–61. https://doi.org/10.1016/s0924-4247(99)00251-4
Zadeh E, Sawan M (2005) High accuracy differential capacitive circuit for bioparticles sensing applications. In: 48th Midwest symposium on circuits and systems. IEEE
Ghafar-Zadeh E, Sawan M, Chodavarapu V, Hosseini-Nia T (2010) Bacteria growth monitoring through a differential CMOS capacitive sensor. IEEE Trans Biomed Circuits Syst 4:232–238. https://doi.org/10.1109/tbcas.2010.2048430
Ferri G, Stornelli V, Parente F, Barile G (2016) Full range analog Wheatstone bridge-based automatic circuit for differential capacitance sensor evaluation. Int J Circuit Theory Appl 45:2149–2156. https://doi.org/10.1002/cta.2298
Singh T, Saether T, Ytterdal T (2009) Current-mode capacitive sensor interface circuit with single-ended to differential output capability. IEEE Trans Instrum Meas 58:3914–3920. https://doi.org/10.1109/tim.2009.2021241
Tan S, Liu C, Yeh L, Chiu Y, Hsu K (2011) A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability. J Micromech Microeng 21:035005. https://doi.org/10.1088/0960-1317/21/3/035005
Mochizuki K, Watanabe K, Masuda T (1998) A high-accuracy high-speed signal processing circuit of differential-capacitance transducers. IEEE Trans Instrum Meas 47:1244–1247. https://doi.org/10.1109/19.746591
Barile G et al (2018) A CMOS full-range linear integrated interface for differential capacitive sensor readout. Sens Actuators A: Phys 281:130–140. Available: https://doi.org/10.1016/j.sna.2018.08.033
Vejdani P, Allidina K, Nabki F (2017) Analysis of sensitivity and power consumption of chop** techniques for integrated capacitive sensor interface circuits. J Low Power Electron Appl 7:31. https://doi.org/10.3390/jlpea7040031
Brookhuis R, Lammerink T, Wiegerink R (2015) Differential capacitive sensing circuit for a multi-electrode capacitive force sensor. Sens Actuators, A 234:168–179. https://doi.org/10.1016/j.sna.2015.08.020
Flammini A, Marioli D, Sisinni E, Taroni A (2005) A multichannel DSP-based instrument for displacement measurement using differential variable reluctance transducer. IEEE Trans Instrum Meas 54:178–183. https://doi.org/10.1109/tim.2004.834052
Kar S, Chatterjee P, Mukherjee B, Swamy K, Sen S (2018) A differential output interfacing ASIC for integrated capacitive sensors. IEEE Trans Instrum Meas 67:196–203. https://doi.org/10.1109/tim.2017.2761238
Depari A, Sisinni E, Flammini A, Ferri G, Stornelli V, Barile G et al (2018) Autobalancing analog front end for full-range differential capacitive sensing. IEEE Trans Instrum Meas 67:885–893. https://doi.org/10.1109/tim.2017.2785160
Barile G, Ferri G, Parente F, Stornelli V, Depari A, Flammini A et al (2017) A standard CMOS bridge-based analog interface for differential capacitive sensors. In: 2017 13th conference on Ph.D. research in microelectronics and electronics (PRIME). IEEE, pp 281–284
Barile G, Ferri G, Parente F, Stornelli V, Depari A, Flammini A et al (2017) Linear integrated interface for automatic differential capacitive sensing. In: Eurosensors 2017, MDPI, p 592. https://doi.org/10.3390/proceedings1040592. Accessed 24 July 2018
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Barile, G., Ferri, G., Depari, A., Flammini, A., Sisinni, E. (2020). Automatic Differential Capacitive Sensing by Means of Linear Interface. In: Di Francia, G., et al. Sensors and Microsystems. AISEM 2019. Lecture Notes in Electrical Engineering, vol 629. Springer, Cham. https://doi.org/10.1007/978-3-030-37558-4_19
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