Abstract
Air or gas-borne particles are encountered in numerous industrial operations and their measurement is required in situations including process monitoring, microcontamination control, environmental emissions, and occupational safety monitoring. In microelectronic manufacturing, for example, particles adversely affect the product yield. Ultraclean rooms and environments are often essential and monitoring of small submicrometer particles at very low concentration levels is required to ensure proper operation of such facilities. In other examples, a sample may be collected on a substrate for mass loading measurement or transported for particle size measurement using real-time instruments such as light scattering counters. Preservation of mass and size characteristics in the sample transfer is essential for truly representative sampling.
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© 1990 Springer Science+Business Media New York
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Ranade, M.B., Chang, Y.C., Gentry, J.W. (1990). Sampling of Airborne Particles for Contamination Assessment. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_2
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DOI: https://doi.org/10.1007/978-1-4899-3544-1_2
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