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Low Temperature Plasmas

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Plasma Physics

Part of the book series: Lecture Notes in Physics ((LNP,volume 670))

Abstract

Characteristic properties and generation mechanisms of low temperature plasmas in different gas discharges are presented. A special part is focussed to the plasma surface transition including electric probes for plasma diagnostics. Reactive plasma surface interaction is exemplarily shown in polymer surface modification and deposition of thin organic films.

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Authors and Affiliations

  1. Institut für Physik, E.-M.-Arndt-Universität Greifswald, Domstraße 10a, 17489 Greifswald, Germany

    J. Meichsner

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  1. J. Meichsner
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Editor information

Andreas Dinklage Thomas Klinger Gerrit Marx Lutz Schweikhard

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Meichsner, J. Low Temperature Plasmas. In: Dinklage, A., Klinger, T., Marx, G., Schweikhard, L. (eds) Plasma Physics. Lecture Notes in Physics, vol 670. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11360360_5

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