Abstract
In order to show the crystallization behavior for various substrate temperatures we grew V2O5 films at different temperatures using a radio frequency sputtering system. Spectroscopic ellipsometry and a thermo-reflectance method were used to investigate the optical and the thermal properties of V2O5 films with different crystallization structures. The transmission spectra and the n and the k spectra revealed changes over the entire measurement range. The optical properties of the V2O5 films were affected by variations in the crystalline structure. The thermal conductivities of the V2O5 films with amorphous and crystalline structures were 0.838 Wm−1K−1 and 1.749 Wm−1K−1, respectively, and the thermal conductivity depended on the crystallization of the film. Furthermore, the variation of the crystalline structure led to changes in the optical and the thermal properties.
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Kang, M., Kim, S.W., Ryu, JW. et al. Optical and thermal properties of V2O5 thin films with crystallization. Journal of the Korean Physical Society 62, 1134–1138 (2013). https://doi.org/10.3938/jkps.62.1134
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DOI: https://doi.org/10.3938/jkps.62.1134