Abstract
The theoretical relations optimizing the design of the microbolometric element of the focal plane arrays (FPAs) and ensuring the improvement of its performance characteristics are considered. The requirements for the parameters of the elements and the materials used for their manufacture are formulated, which provide a fundamental opportunity to minimize the thermal relaxation time constant of the bolometric sensor in order to increase the frame frequency of the matrices. The results of their modeling are presented, which make it possible to optimize the design and its implementation using modern technological processes for the formation of microbolometric elements with high operating speed, taking into account the requirements of specific applications.
Similar content being viewed by others
REFERENCES
S. Tinnes, N. Boudou, and A. Durand, ‘‘ULIS bolometer improvements for fast imaging applications,’’ in OECD Conf. Center, Paris, 2018.
S. A. Demin, B. V. Troshin, S. A. Zhukova, and V. E. Turkov, ‘‘High-speed broadband infrared microbolometric detector,’’ RF Patent No. 2574524 S1, Byull. Izobret., No. 4 (2016).
S. A. Zhukova, V. E. Turkov, S. A. Demin, and B. V. Troshin, ‘‘Microbolometric detector sensitive in two spectral ranges,’’ Prikl. Fiz., No. 4, 67–72 (2016).
V. A. Fedirko, R. Z. Khafizov, and E. A. Fetisov, ‘‘Optimal design of MEMS thermopile element for IR imager array,’’ Probl. Razrab. Perspekt. Micro-Nanoelektron. Sist., No. 4, 59–64 (2016).
V. F. Fedirko and R. Z. Khafizov, ‘‘Optimized thermocouple sensor,’’ RF Patent No. 2681224, 2019.
Uncooled Infrared Imaging Arrays and Systems, Ed. by P. W. Kruse and D. D. Sktrud, Semiconductors and Semimetals, vol. 47 (Academic Press, San Diego, Calif., 1997).
E. M. Smith, ‘‘Vanadium oxide microbolometers with patterned gold black or plasmonic resonant absorbers,’’ PhD Thesis (Univ. Central Florida, Orlando, Fla., 2015).
J. M. Lloyd, Thermal Imaging Systems, Optical Physics and Engineering (Springer, Boston, 1975). https://doi.org/10.1007/978-1-4899-1182-7
E. M. Smith, D. Panjwani, J. Ginn, A. Warren, C. Long, P. Figuieredo, C. Smith, J. Perlstein, N. Walter, C. Hirschmugl, R. E. Peale, and D. J. Shelton, ‘‘Enhanced performance of VO\({{}_{x}}\)-based bolometer using patterned gold black absorber,’’ Proc. SPIE 9451, 94511I (2015). https://doi.org/10.1117/12.2177401
K. Mizuno, J. Ishii, H. Kishida, Y. Hayamizu, S. Yasuda, D. N. Futaba, M. Yumura, and K. Hata, ‘‘A black body absorber from vertically aligned single-walled carbon nanotubes,’’ Proc. Natl. Acad. Sci. U. S. A. 106, 6044–6047 (2009). https://doi.org/10.1073/pnas.0900155106
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare that they have no conflicts of interest.
About this article
Cite this article
Khafizov, R.Z., Startsev, V.V. & Moskvichev, V.Y. Bolometric Focal Plane Arrays with High Operating Speed. Optoelectron.Instrument.Proc. 57, 511–520 (2021). https://doi.org/10.3103/S8756699021050071
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.3103/S8756699021050071