Abstract
Samples of heterostructures made on the basis of semiconductor wafers of binary compounds GaAs, GaSb and InAs as a result of substitution of Group V elements of atoms by atoms of other Group V elements supplied in the form of vapors, including simultaneous Zn diffusion are studied. The possibility of using the obtained structures to make a photoelectric converter is demonstrated.
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SIMS measurements were performed using the equipment of the Center of Multi-User Equipment “Material Science and Diagnostics for Advanced Technologies”, supported by the RF Ministry of Science and Higher Education of the Russian Federation.
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Vasil’ev, V.I., Gagis, G.S., Ber, B.Y. et al. Obtaining of Nanoscale Layers of Solid Solutions in GaSb, GaAs, InAs Wafers Because of Solid-Phase Substitution Reactions. Bull. Russ. Acad. Sci. Phys. 87, 849–852 (2023). https://doi.org/10.3103/S1062873823702106
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DOI: https://doi.org/10.3103/S1062873823702106