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Pixelated carbon nanotube forests

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Abstract

Carbon nanotube forests (CNTFs) were grown on a patterned substrate to form square pixelated arrays. Two-level full factorial optimization first determined the best conditions for synthesis by chemical vapor deposition catalyzed by iron (Fe) nanoparticles deposited on oxidized silicon substrates. Varied parameters included growth temperature, growth time, and acetylene-to-hydrogen gas flow rate ratio. Argon was used as a carrier gas. Unpatterned CNTF heights were grown with values from 15.3 to 185.7 microns. Reactive ion etching of the substrate in oxygen plasma dramatically improved forest growth rates. Uniform square 7 × 7 pixel arrays were produced by contact photolithography and lift-off of the deposited Fe. Each pixel was subdivided into square islands separated by gaps with different island and gap dimensions, which ranged from 4 to 50 microns and 1 to 10 microns, respectively. The results demonstrate the fabrication of thermally and electrically isolated vertically aligned CNTF islands, which have applications to batteries, sensors, infrared absorbers, and infrared or electron emitters.

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Acknowledgments

This work was supported by Santa Barbara Infrared Inc.

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Authors and Affiliations

  1. Department of Physics, University of Central Florida, Orlando, FL, 32816, USA

    Darian Smalley, Masa Ishigami & R. E. Peale

  2. Nanoscience Center, University of Central Florida, Orlando, FL, 32816, USA

    Darian Smalley & Masa Ishigami

  3. Truventic LLC, 1209 W. Gore St., Orlando, FL, 32805, USA

    R. E. Peale

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  1. Darian Smalley
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Correspondence to R. E. Peale.

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R. E. Peale has ownership in Truventic LLC and may benefit financially from the results of this research. Otherwise, all authors certify that they have no affiliations with or involvement in any organization or entity with any financial interest or non-financial interest in the subject matter or materials discussed in this manuscript.

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Smalley, D., Ishigami, M. & Peale, R.E. Pixelated carbon nanotube forests. MRS Advances 8, 361–364 (2023). https://doi.org/10.1557/s43580-023-00527-z

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