SpringerLink
Log in

Integrated Optoelectronic Devices on Silicon

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Silicon (Si) has been the dominating material platform of microelectronics over half century. Continuous technological advances in circuit design and manufacturing enable complementary metal-oxide semiconductor (CMOS) chips with increasingly high integration complexity to be fabricated in an unprecedently scale and economical manner. Conventional Si-based planar lightwave circuits (PLCs) has benefited from advanced CMOS technology but only demonstrate passive functionalities in most circumstances due to poor light emission efficiency and weak major electro-optic effects (e.g., Pockels effect, the Kerr effect and the Franz–Keldysh effect) in Si. Recently, a new hybrid III–V-on-Si integration platform has been developed, aiming to bridge the gap between Si and III–V direct-bandgap materials for active Si photonic integrated circuit applications. Since then high-performance lasers, amplifiers, photodetectors and modulators, etc. have been demonstrated. Here we review the most recent progress on hybrid Si lasers and high-speed hybrid Si modulators. The former include distributed feedback (DFB) lasers showing over 10 mW output power and up to 85 oC continuous-wave (cw) operation, compact hybrid microring lasers with cw threshold less than 4 mA and over 3 mW output power, and 4-channel hybrid Si AWG lasers with channel space of 360 GHz. Recently fabricated traveling-wave electro-absorption modulators (EAMs) and Mach-Zehnder interferometer modulators (MZM) on this platform support 50 Gb/s and 40 Gb/s data transmission with over 10 dB extinction ratio, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price includes VAT (Germany)

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Pasquariello, M. Camacho, F. Ericsson and K. Hjort, Japanese Journal of Applied Physics 40(8), 4837–4844 (2001).

    Article  CAS  Google Scholar 

  2. H. Kawanami, Solar Energy Materials and Solar Cells 66(1-4), 479–486 (2001).

    Article  CAS  Google Scholar 

  3. H. Park, A. W. Fang, S. Kodama and J. E. Bowers, Optics Express 13(23), 9460–9464(2005).

    Article  CAS  Google Scholar 

  4. A. W. Fang, P. Hyundai, R. Jones, O. Cohen, M. J. Paniccia and J. E. Bowers, Photonics Technology Letters, IEEE 18(10), 1143–1145 (2006).

    Article  CAS  Google Scholar 

  5. A. W. Fang, H. Park, Y.-H. Kuo, R. Jones, O. Cohen, D. Liang, O. Raday, M. N. Sysak, M. J. Paniccia and J. E. Bowers, Materials Today 10(7-8), 28–35 (2007).

    Article  CAS  Google Scholar 

  6. T. Maruyama, T. Okumura, S. Sakamoto, K. Miura, Y. Nishimoto and S. Arai, Optics Express 14(18), 8184–8188 (2006).

    Article  CAS  Google Scholar 

  7. A. W. Fang, B. R. Koch, R. Jones, E. Lively, L. Di, K. Ying-Hao and J. E. Bowers, Photonics Technology Letters, IEEE 20(20), 1667–1669 (2008).

    Article  CAS  Google Scholar 

  8. A. W. Fang, E. Lively, Y.-H. Kuo, D. Liang and J. E. Bowers, Optics Express 16(7), 4413–4419(2008).

    Article  Google Scholar 

  9. H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. N. Sysak, M. J. Paniccia and J. E. Bowers, Optics Express 15(10), 6044–6052 (2007).

    Article  CAS  Google Scholar 

  10. A. Andrew, L. Ling, J. Richard, M. Michael, K. Brian, L. Wei-Zen, B. Juthika, K. Brian, L. Hai-Feng, R. Haisheng, S. Matthew, K. Christine, S. Rushdy, L. Dror, H. Lior, B. Roi, L. Stas, L. Ansheng, S. Kevin, D. Olufemi, N. Neil, Y. Tao, H. Frederick, I. w. Hsieh, H. John, B. Robert, P. Hyundai, B. Jock, L. Simon, N. Hat, A. Hinmeng, N. Katie, M. Priya, H. Mahtab and P. Mario, presented at the Integrated Photonics Research, Silicon and Nanophotonics, 2010 (unpublished).

    Google Scholar 

  11. G. Kurczveil, M. J. Heck, J. D. Peters, J. M. Garcia, D. Spencer and J. E. Bowers, Selected Topics in Quantum Electronics, IEEE Journal of 17(6), 1521–1527.

  12. D. Liang, M. Fiorentino, T. Okumura, H.-H. Chang, D. Spencer, Y.-H. Kuo, A. W. Fang, D. Dai, R. G. Beausoleil and J. E. Bowers, Optics Express 17(22), 20355–20364 (2009).

    Article  CAS  Google Scholar 

  13. D. Liang, M. Fiorentino, S. Srinivasan, J. E. Bowers and R. G. Beausoleil, IEEE Journal of Selected Topics in Quantum Electronics, online article (2011).

    Google Scholar 

  14. M. N. Sysak, H. Park, A. W. Fang, J. E. Bowers, R. Jones, O. Cohen, O. Raday and M. J. Paniccia, Optics Express 15(23), 15041–15046 (2007).

    Article  CAS  Google Scholar 

  15. D. Liang, M. Fiorentino, R. G. Beausoleil and J. E. Bowers, in IEEE Winter Topicals (Marjoca, Spain, 2010), Vol. paper TuD4.1.

    Google Scholar 

  16. M. N. Sysak, D. Liang, M. Fiorentino, R. G. Beausoleil, G. Kurceival, M. Piels, R. Jones and J. E. Bowers, IEEE Journal of Selected Topics in Quantum Electronics online article (2011).

    Google Scholar 

  17. D. Liang, M. Fiorentino, S. T. Todd, G. Kurczveil, R. G. Beausoleil and J. E. Bowers, IEEE Photonics Technology Letters 23(10), 657–659 (2011).

    Article  CAS  Google Scholar 

  18. H.-W. Chen, Y. Kuo and J. E. Bowers, Chinese Optics Letters 7(4), 280–285 (2009).

    Article  CAS  Google Scholar 

  19. H.-W. Chen, Y.-H. Kuo and J. E. Bowers, Photonics Technology Letters, IEEE 20(23), 1920–1922 (2008).

    Article  CAS  Google Scholar 

  20. Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng and J. C. Campbell, Nat Photon 3(1), 59–63 (2009).

    Article  CAS  Google Scholar 

  21. H.-W. Chen, J. D. Peters and J. E. Bowers, Opt. Express 19(2), 1455–1460.

  22. H.-W. Chen, Y.-H. Kuo and J. E. Bowers, presented at the The 6th IEEE international conference on Group IV Photonics, San Francisco, CA, USA, 2009 (unpublished).

  23. Y. Tang, H.-W. Chen, S. Jain, J. D. Peters, U. Westergren and J. E. Bowers, Opt. Express 19, 5811–5816 (2011).

    Article  Google Scholar 

  24. Y.-H. Kuo, H.-W. Chen and J. E. Bowers, Opt. Express 16(13), 9936–9941 (2008).

    Article  CAS  Google Scholar 

  25. F. Devaux, S. Chelles, A. Ougazzaden, A. Mircea and J. Harmand, Semicond. Sci. Technol. 10(7), 887–901 (1995).

    Article  CAS  Google Scholar 

Download references

Acknowledgments

Since this is a review paper, the credit goes to people directly involving in the work discussed here. They include Alexander Fang, Geza Kurczveil, Martijn Heck, Hui-Wen Chen, Yongbo Tang and Jonathan Peters. The authors would also like to thank others participating in Si photonics research in Bowers group at UCSB, Profs. Daniel Blumenthal and Larry Coldren at UCSB, Mario Paniccia, Hyundai Park, Mathew Sysak and Richard Jones at Intel Corp., Raymond Beausoleil and Marco Fiorentino at HP Labs, and Greg Fish and Eric Hall at Aurrion. We are also very grateful to long-term support from DARPA/MTO program, ARL, Intel, HP and Rockwell Collins.

Author information

Authors and Affiliations

  1. Intelligent Infrastructure Lab, HP Labs, 1501 Page Mill Road, Palo Alto, CA, 94304, U.S.A.

    Di Liang

  2. Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, 93106, U.S.A.

    Di Liang & John E. Bowers

Authors
  1. Di Liang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. John E. Bowers
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liang, D., Bowers, J.E. Integrated Optoelectronic Devices on Silicon. MRS Online Proceedings Library 1396, 85–96 (2012). https://doi.org/10.1557/opl.2012.140

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/opl.2012.140

Search

Navigation