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High-Rate Deposition Of Rare-Earth Doped Silicate Nanoparticles For Porous & Dense Optical Films

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Abstract

A novel deposition process has been developed for manufacturing of high quality rare-earth doped glass films with complex composition. This process, Laser Reactive Deposition (LRD™), comprises photothermal laser pyrolysis using an aerosol feedstock coupled with deposition of the resulting nanoparticle product onto Si substrates with our without an underlying glass film. This paper describes this novel process as well as the structure, properties and performance of the Er-doped, multicomponent silicate glass films produced to date with this process.

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Acknowledgments

The authors would like to thank Ken Michon, Mike McManus, Mark Costanza, Luis Acosta, Jason Ventrice, and Alison Pinoli for their assistance with processing and experimental work.

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Authors and Affiliations

  1. NanoGram Corporation, 2911 Zanker Rd., San Jose, CA, 95134, USA

    Craig R. Horne, Shiv Chiruvolu, Ronald Mosso & William McGovern

  2. NeoPhotonics Corporation, 2911 Zanker Rd., San Jose, CA, 95134, USA

    Craig R. Horne, Pierre de Mascarel, Russell Blume, Jesse Jur, Cecile Cohen-Jonathan, Michael Chapin, Jonathan Posner, Wei Cho Foo, Christian Honeker, Qing Zhu, Shiv Chiruvolu, Ronald Mosso & William McGovern

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  1. Craig R. Horne
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  2. Pierre de Mascarel
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  3. Russell Blume
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  4. Jesse Jur
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  5. Cecile Cohen-Jonathan
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  6. Michael Chapin
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  7. Jonathan Posner
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  8. Wei Cho Foo
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  9. Christian Honeker
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  10. Qing Zhu
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  11. Shiv Chiruvolu
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  12. Ronald Mosso
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  13. William McGovern
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Horne, C.R., de Mascarel, P., Blume, R. et al. High-Rate Deposition Of Rare-Earth Doped Silicate Nanoparticles For Porous & Dense Optical Films. MRS Online Proceedings Library 866, 47–52 (2004). https://doi.org/10.1557/PROC-866-V2.7

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  • DOI: https://doi.org/10.1557/PROC-866-V2.7

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