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Indium distribution inside quantum wells: The effect of growth interruption in MBE

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Abstract

Quantitative analysis of high resolution electron microscopy image has been carried out to measure the indium distribution inside InGaN/GaN quantum well. The analyzed samples were nominally grown with 15% indium composition by molecular beam epitaxy with interruptions during the InxGa1-xN layer growth. The strain distribution is not homogeneous inside the quantum wells, and indium rich clusters can be observed. Areas with almost no indium concentration were observed corresponding to the growth interruption. A comparison with samples grown by metalorganic chemical vapor deposition is attempted.

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Authors and Affiliations

  1. ESCTM-CRISMAT, UMR6508-CNRS, ISMRA. 6, Boulevard Maréchal Juin, 14050, Caen Cedex, France

    A. M. Sanchez & P. Ruterana

  2. Institute of Physics, PAS, Al. Lotników 32/46, 02-668, Warsaw, Poland

    S. Kret

  3. IFTR PAS, Świątokrzyska 21, 00-049, Warsaw, Poland

    P. Dłużewski & G. Maciejewski

  4. CRHEA, UPR 10 CNRS, 1 rue Bernard Gregory, 06560, Valbonne, France

    N. Grandjean & B. Damilano

Authors
  1. A. M. Sanchez
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  2. P. Ruterana
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  3. S. Kret
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  4. P. Dłużewski
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  5. G. Maciejewski
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  6. N. Grandjean
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  7. B. Damilano
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Sanchez, A.M., Ruterana, P., Kret, S. et al. Indium distribution inside quantum wells: The effect of growth interruption in MBE. MRS Online Proceedings Library 743, 66 (2002). https://doi.org/10.1557/PROC-743-L6.6

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  • DOI: https://doi.org/10.1557/PROC-743-L6.6

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