Abstract
Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.
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Sano, M., Okamura, J. & Shinkai, S. Formation of Mesoscopic Polymer Dots by Rubbing Transfer. MRS Online Proceedings Library 576, 155–158 (1999). https://doi.org/10.1557/PROC-576-155
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DOI: https://doi.org/10.1557/PROC-576-155