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High-Dielectric Constant Insulators and the AMLCD Process: Is Amorphous BST a Candidate?

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Authors and Affiliations

  1. IBM T.J. Watson Research Center, Yorktown Heights, NY, USA

    P. Andy, D. Neumayer, P. Duncombe, C. Dimitrakopoulos, F. Libsch, R. Laibowitz, A. Grill & R. Wisnieff

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  1. P. Andy
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  2. D. Neumayer
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  3. P. Duncombe
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  4. C. Dimitrakopoulos
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  5. F. Libsch
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  6. R. Laibowitz
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  7. A. Grill
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  8. R. Wisnieff
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Andy, P., Neumayer, D., Duncombe, P. et al. High-Dielectric Constant Insulators and the AMLCD Process: Is Amorphous BST a Candidate?. MRS Online Proceedings Library 558, 129–134 (1999). https://doi.org/10.1557/PROC-558-129

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