Abstract
Buried channel wave guides have been fabricated from thermally stable non linear optical polyimides. The material system consists of a polyimide cladding and a polyimide based active material. The buried channel wave guides are fabricated by a trench and fill process. This process was used for the fabrication of active wave guides at process temperatures above 300 °C. Single mode wave guides, and Mach-Zenhder interferometers, were fabricated with attenuation < 2 dB/cm. Active Mach-Zehnder interferometers with a Vπ phase shift of 50 volts and the low attenuation were fabricated. Thermal aging of the poled active device demonstrated no change in activity after 30 minutes at 230°C.
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Kenney, J.T., Binkley, E.S., Jen, A.KY. et al. Channel Waveguides and Modulators Fabricated from High Temperature Second Order Nonlinear Optical Polymers. MRS Online Proceedings Library 328, 511–516 (1993). https://doi.org/10.1557/PROC-328-511
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DOI: https://doi.org/10.1557/PROC-328-511