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Nanocrystalline α-Al2O3 coatings obtained by reactive thermal anodic evaporation in arc discharge at low temperature

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Abstract

Al2O3 nanocrystalline coatings are obtained for the first time by anodic thermal evaporation of aluminum in an arc discharge in an oxygen–argon mixture at a temperature of 600°C on stainless-steel substrates with a Cr2O3 sublayer. The effect of the surface state of the samples and ion energy on the phase composition, microstructure, and properties of the coating is assessed. The α-Al2O3 phase is formed in the range of the bias potential of 25–200 V, with the growth of which the microcrystallite size decreases from 60 to 15 nm and the hardness of the coating increases from 8 to 20 GPa.

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Authors and Affiliations

  1. Institute of Electrophysics, Ural Branch, Russian Academy of Sciences, Yekaterinburg, 620216, Russia

    N. V. Gavrilov, A. S. Kamenetskikh & P. V. Tretnikov

  2. Ural Federal University, Yekaterinburg, 620002, Russia

    A. V. Chukin

Authors
  1. N. V. Gavrilov
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  2. A. S. Kamenetskikh
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  3. P. V. Tretnikov
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  4. A. V. Chukin
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Corresponding author

Correspondence to A. S. Kamenetskikh.

Additional information

Original Russian Text © N.V. Gavrilov, A.S. Kamenetskikh, P.V. Tretnikov, A.V. Chukin, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 20, pp. 86–94.

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Gavrilov, N.V., Kamenetskikh, A.S., Tretnikov, P.V. et al. Nanocrystalline α-Al2O3 coatings obtained by reactive thermal anodic evaporation in arc discharge at low temperature. Tech. Phys. Lett. 43, 951–954 (2017). https://doi.org/10.1134/S1063785017100200

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  • DOI: https://doi.org/10.1134/S1063785017100200

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