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Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source

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Abstract

A pulsed RF discharge is considered experimentally as a working process of an RF ion source. It is shown that an increase in the ion current can be obtained in comparison with the continuous operation mode when such a discharge is operating. This increase is the greater, the greater the difference between the characteristic time of the drop of the ion current after turning off the RF power and the rise time of the ion current when the RF power is turned on. The pulsation parameters at which the ion current is maximized are estimated. It is shown that an external constant longitudinal magnetic field in the range of 0–7.2 mT nonmonotonically affects the maximum and equilibrium value of the ion current in a pulse and does not affect the decrease rate of the ion current after the RF power is turned off.

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Funding

This work was supported by Russian Science Foundation grant no. 21-72-10090, https://rscf.ru/en/project/21-72-10090/.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    I. I. Zadiriev, E. A. Kralkina, K. V. Vavilin, A. M. Nikonov & G. V. Shvidkiy

Authors
  1. I. I. Zadiriev
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  2. E. A. Kralkina
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  3. K. V. Vavilin
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  4. A. M. Nikonov
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  5. G. V. Shvidkiy
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Correspondence to I. I. Zadiriev.

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Translated by L. Mosina

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Zadiriev, I.I., Kralkina, E.A., Vavilin, K.V. et al. Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source. Plasma Phys. Rep. 49, 1424–1428 (2023). https://doi.org/10.1134/S1063780X23601268

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