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MEMS Switch Based on a Cantilever with Increased Contact Force

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Abstract

MEMS switches are of significant interest for promising radio-electronic systems, but have not yet found widespread use due to the low reliability of microcontacts. The switch develops a low contact force, which results in high and unstable contact resistance. The force is usually increased by using electrodes with complex shapes and large areas, but a simple and compact configuration is preferable. This study presents a switch based on a 50-µm-long cantilever. For the first time, a method for selecting the vertical dimensions of the product is described, increasing the contact force to values in excess of 100 μN, necessary for reliable operation of the contacts. Test samples are manufactured and tested, and the performance characteristics are compared with the calculation results.

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Funding

This study was carried out as part of a state assignment of Valiev Institute of Physics and Technology, Russian Academy of Sciences on topic no. FFNN-2022-0017, using the equipment of the Center for Collective Use “Diagnostics of Micro- and Nanostructures.”

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  1. Valiev Institute of Physics and Technology, Yaroslavl Branch, Russian Academy of Sciences, 150007, Yaroslavl, Russia

    I. A. Belozerov & I. V. Uvarov

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  1. I. A. Belozerov
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Correspondence to I. A. Belozerov or I. V. Uvarov.

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Belozerov, I.A., Uvarov, I.V. MEMS Switch Based on a Cantilever with Increased Contact Force. Russ Microelectron 52, 475–482 (2023). https://doi.org/10.1134/S1063739723700774

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