Abstract
The effect of the external discharge parameters on the electrophysical parameters and emission spectra of difluorodichloromethane plasma is analyzed. Data on the reduced electric field strength and gas temperature are obtained. It is established that the reduced electric field strength in difluorodichloromethane plasma decreases markedly with increasing gas pressure (at a constant discharge current). It is shown that a linear increase in the gas temperature with increasing pressure is due to the increase in the specific power deposited in the discharge. Atomic and molecular components are found in the emission spectra of the glow discharge of difluorodichloromethane. It is established that, with increasing current, a linear increase in the radiation intensity occurs, which corresponds to the mechanism of the direct excitation of the radiating states upon electron impact and indicates the absence of secondary processes.
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Murin, D.B., Chesnokov, I.A., Gogulev, I.A. et al. Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane. Russ Microelectron 52, 337–343 (2023). https://doi.org/10.1134/S1063739723700592
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DOI: https://doi.org/10.1134/S1063739723700592