Abstract
Some methods of the formation of microwelds, which are most acceptable for the assembly of 3D-wares with the use of wire leadouts, have been analyzed. Some peculiarities of the bonding of inner wirings on a die and a package by different welding methods, such as pressure welding with indirect pulsed heating and thermosonic, ultrasonic, and split-tip welding, have been considered. The effect of structural and technological factors on the quality of microwelds made by ultrasonic welding with the use of aluminum wire, aluminum metallization on a die, and gold, nickel, and nickel alloy coatings has been studied. Some information on microwelds made with the use of copper wire and copper metallization has been represented.
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References
Bondar’, D.M., Modern chip manufacturing and assembly technologies in semiconductor microelectronics, Tekhnol. Elektron. Prom-sti, 2011, no. 7, pp. 52–60.
Stroganov, A.V., Tsybin, S.A., and Bystritskii, A.V., 3D-LSI three-dimensional integrated circuits, Komponenty Tekhnol., 2011, no. 1, pp. 38–41.
Mukhina, E. and Bashta, P., 3D assembly: technology of through silicon vias, Elektronika: Nauka. Tekhnol. Biznes, 2009, no. 2, pp. 92–93.
Vasil’ev, A., Modern technologies of 3D integration, Komponenty Tekhnol., 2010, no. 1, pp. 156–158.
Balashov, Yu.S., Zenin, V.V., and Segal, Yu.V., Sborochnye operatsii i ikh kontrol’ v mikroelektronike. Uchebnoe posobie (Assembly Operations and Their Control in Microelectronics: Textbook), Voronezh: Voronezh Gos. Tekhn. Univ., 2004.
US Patent 6075281, 2000.
Khokhlun, A. and Beil’, V., Some peculiarities of the technology of the production of modern multichip microassemblies and MCM-C “system-in-packages,” Tekhnol. Elektron. Prom-sti, 2011, no. 5, pp. 46–49.
Shmakov, M., Khokhlun, A., and Parshin, V., Shkola proizvodstva gibridnoplenochnykh integral’nykh skhem (School of the Production of Hybrid Thin-Film Integrated Circuits), Moscow: ZAO Ostec, 2008.
Lanin, V. and Petukhov, I., Ultrasonic equipment for the welding of microconductors, Komponenty Tekhnol., 2009, no. 8, pp. 124–128.
Zenin, V.V., Novokreshchenova, E.P., and Khishko, O.V., Flip-chip bump-lead fabrication: A review, Russ. Microelectron., 2008, vol. 37, no. 2, pp. 107–113.
Yeau-Ren, J. and Jeng-Haur, H., A microcontact approach for ultrasonic wire bonding in microelectronics, Trans. ASME, J. Tribol., 2001, vol. 123, no. 4, pp. 725–731.
Pogorel’tsev. I., Some methods of improving the quality and reliability of ultrasonic welding, Silov. Elektron., 2010, no. 2, pp. 102–104.
Lanin V., Petukhov, I., and Mordvintsev, D., Improving the quality of microwelds in integrated circuits with the use of high-frequency ultrasonic systems, Tekhnol. Elektron. Prom-sti, 2010, no. 1, pp. 48–50.
Koval’chuk, G., Petukhov, I., Lanin, V., et al., New generation of ultrasonic microwelding systems, Tekhnol. Elektron. Prom-sti, 2011, no. 8, pp. 36–40.
RF Patent 2271909, Byull. Izobret., 2006, no. 8.
Emel’yanov, V.A., Korpusirovanie integral’nykh skhem (Packaging of Integrated Circuits), Minsk: Polifakt, 1998.
US Patent 5465899, 1995.
Gorlov, M.I., Zenin, V.V., and Kolychev, A.I., Studying the effect of the composition of aluminum metallization on the quality of aluminum-aluminum micro-welds, Izv. Vyssh. Uchebn. Zaved. Elektron., 1998, no. 6, pp. 67–72.
Zenin, V.V., Bokarev, D.I., and Segal, Yu.E., Studying the microwelds of an aluminum wire with the gold galvanic coatings of electronic ware packages, Izv. Vyssh. Uchebn. Zaved. Elektron., 1999, no. 5, pp. 67–74.
Gurov, K.P., Gusev, O.V., Dol’nikov, S.S., et al., Some peculiarities of the growth of phases during the annealing of gold-aluminum thermocompression contacts in the current and currentless regimes, Fiz. Khim. Obrab. Mater., 1980, no. 2, pp. 79–89.
Pimenov, V.I., Gurov, K.P., Khudyakov, K.I., et al., On the effect of the current regime on the formation of phases in a diffusion layer, Fiz. Khim. Obrab. Mater., 1978, no. 2, pp. 107–111.
Kolesnikov, D.P., Andrushko, A.F., and Sukhina, E.I. Aluminum-gold interaction in thin layers, Fiz. Met. Metalloved., 1972, no. 3, pp. 529–575.
Okumura, K., Degradation of bonding strength (Al wire Au film) by Kirkendal voids, J. Electrochem. Soc., 1981, vol. 128, no. 3, pp. 571–575.
Lyashok, A.P., Rossoshinskii, A.A., and Shevchenko, E.S., On the reason of aluminum-gold microweld faults in integrated circuits, Elektron. Tekh. Ser. 6. Microelektronika, 1968, no. 3, pp. 74–79.
Thin Films. Interdiffusion and Reactions, Poate, J.M., Tu, K.N., and Maier, J.W., Eds., New York: Wiley, 1978.
Aleksenko, A.G., Zenin, V.V., and Kolychev, A.I., Stoikost’ mikrosoedinenii izdelii elektronnoi tekhniki k temperaturnym vozdeistviyam. Obzor (Resistance of the Microwelds of Electronic Wares to Thermal Effects: Review), Moscow: Izd. Tsentra Nauchn.-Tekhn. Inform. Poisk, 1988, Ser. VII, no. 77.
Kolychev, A.I. and Sedaev, V.P., Improving the reliability of microwelds in semiconductor assemblies, in Progressivnaya tekhnologiya v svarochnom proizvodstve (Advanced Technology in Welding Industry), Voronezh: Voronezh Politekhn. Univ., 1985, pp. 46–51.
Zenin, V.V., Segal, Yu.E., and Kolychev, A.I., Studying the quality of aluminum wire microwelds in electronic ware packings coated by nickel and its alloys, Izv. Vyssh. Uchebn. Zaved. Elektron., 2000, no. 2, pp. 37–44.
Erusalimchik, I.G., Ruzanov, V.V., Shchukina, N.V., et al., Change of the properties of a nickel-boron coating under thermal treatment in hydrogen, Elektron. Tekh. Ser. Poluprovodn. Prib., 1981, no. 5, pp. 48–50.
Vodyanov, Yu.M., Zenin, V.V., and Osenkov, V.N., Studying the corrosion resistance of aluminum conductor-gold film microwelded contacts, Proizv.-Tekhn. Opyt, 1982, no. 5, pp. 12–15.
Matsushita, Y., Studies of breaks in ultra-fine wire, Wire Ind., 1988, vol. 55, no. 656, pp. 588–591.
US Patent 4676827, 1987.
US Patent 4726859, 1988.
Lanin, V. and Petukhov, I., Formation of microwelds in integrated microcircuits via contact microwelding, Tekhnol. Elektron. Prom-sti, 2010, no. 7, pp. 54–58.
Olsen, D.R. and James, K.L., Effect of ambient atmosphere on aluminum-copper wirebond reliability, IEEE Trans. Compon., Hybrids, Manuf. Technol., 1984, vol. 7, no. 4, pp. 357–362.
Pitt, V.A., Needes, G.R.S., and Johnson, R.W., Ultrasonic aluminum wire bonding to copper conductors, in 31st Electron. Compon. Conf., Atlanta, Ga, May 11–13, 1981, New York, 1981, no. 4, pp. 18–23.
Pitt, V.A. and Needes, G.R.S. Thermosonic gold wire bonding to copper conductors, IEEE Trans. Compon., Hybrids, Manuf. Technol., 1982, vol. 5, no. 4, pp. 435–440.
Pitt, V.A. and Needes, G.R.S., Thermosonic gold wire bonding to copper conductors, Solid State Technol., 1983, vol. 26, no. 3, pp. 81–86.
Emel’yanov, V.A., Lanin, V.L., and Lastochkina, V.F., Thermosonic splicing of interconnections with the use of a gold wire on copper frames, Tekhnol. Elektron. Prom-sti, 1998, no. 2, pp. 28–30.
He, M., Novak, S., Vanamurth, L., Bakhru, H., Plawsky, J., and Lu, T.-M., Cu penetration into low-k dielectric during deposition and bias-temperature stress, Appl. Phys. Lett., 2010, vol. 97, no. 25, p. 252901.
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Original Russian Text © V.V. Zenin, A.A. Stoyanov, S.V. Petrov, S.Yu. Chistyakov, 2014, published in Mikroelektronika, 2014, Vol. 43, No. 1, pp. 29–42.
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Zenin, V.V., Stoyanov, A.A., Petrov, S.V. et al. Assembly of 3D-wares with the use of wire leadouts. Russ Microelectron 43, 21–33 (2014). https://doi.org/10.1134/S1063739714010090
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DOI: https://doi.org/10.1134/S1063739714010090