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Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation

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Abstract

Knowledge of the emissivity and thermal conductivity of thin metal films used in conjunction with multilayer mirrors for the spectral selection of radiation in the extreme-ultraviolet- and “soft”-X-ray wavelength ranges is necessary in order to correctly calculate the heating of film elements at high heat loads. Heating is associated with absorption in the film of a significant fraction of the incident intensity, and the concept of a high heat load is somewhat arbitrary, since even at an absorbed intensity level on the order of 1 W/cm2 a freestanding film can be heated in vacuum by several hundred degrees. In the first approximation, to estimate the thermal-conductivity coefficient, one could use tabular values for bulk samples of the corresponding metals or use the well-known Wiedemann-Franz law which links the thermal conductivity and the electrical resistivity of the sample; the latter is easier to measure. However, an analysis of the published data indicates significant errors that are possible when using any of these approaches. Therefore, in this work, we measure the thermal conductivity directly by processing the temperature distribution obtained by infrared (IR) pyrometry over a film sample mounted on a heated frame or heated by a flowing electric current. The thermophysical characteristics (thermal conductivity and emissivity) are determined for samples of film absorption filters based on Mo, Al, and Be of submicron thickness (from 100 nm), as well as for films of copper: a metal whose bulk samples have high thermal and electrical conductivity. As expected, significant differences are found between the thermal and electrical properties of the film materials and the properties of the same metals in monolithic samples.

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Funding

The work was supported by state assignment #0030-2021-0022.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 603087, Nizhny Novgorod, Russia

    A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin & N. I. Chkhalo

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  1. A. Ya. Lopatin
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  2. V. I. Luchin
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  3. N. N. Salashchenko
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  4. N. N. Tsybin
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  5. N. I. Chkhalo
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Correspondence to A. Ya. Lopatin.

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Lopatin, A.Y., Luchin, V.I., Salashchenko, N.N. et al. Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation. J. Surf. Investig. 17, 1323–1331 (2023). https://doi.org/10.1134/S1027451023060344

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  • DOI: https://doi.org/10.1134/S1027451023060344

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