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Effect of the Conditions of the AACVD Synthesis of Thin Nanostructured ZnO Films on Their Microstructural, Optical, and Gas-Sensing Characteristics

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Abstract

The effect of the parameters of the synthesis of finely divided ZnO by aerosol deposition from the gas phase on its microstructural characteristics was studied to develop an efficient method for creating selective gas-sensing films based on semiconductor metal oxides. It was shown that an increase in the operating temperature from 350 to 450°С leads to a change in the shape of the nanoparticles from spherical to rod-shaped and in the continuity of the coatings. The optical and chemoresistive gas-sensing properties of the obtained films were studied, the band gap was calculated in two ways. The highest sensitivity was measured at a detection temperature of 300°C to acetone and ethanol.

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Funding

The study of the gas-sensing properties was supported by a grant of the President of the Russian Federation (grant no. MK-2276.2022.1.3). The development of the methods for the synthesis of semiconductor receptor oxide nanomaterials was supported by the Ministry of Science and Higher Education of the Russian Federation under a state assignment for the Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow, Russia (IGIC RAS). The microstructure and phase composition of the samples were studied using equipment of the Center for Shared Use of Physical Methods of Investigation of Substances and Materials, IGIC RAS, the work of which is supported by the Ministry of Science and Higher Education of the Russian Federation under a state assignment for IGIC RAS.

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Authors and Affiliations

  1. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, 119991, Moscow, Russia

    A. S. Mokrushin, Yu. M. Gorban, I. A. Nagornov, N. P. Simonenko, E. P. Simonenko & N. T. Kuznetsov

  2. Mendeleev University of Chemical Technology of Russia, 125047, Moscow, Russia

    Yu. M. Gorban

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  1. A. S. Mokrushin
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  2. Yu. M. Gorban
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  3. I. A. Nagornov
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  6. N. T. Kuznetsov
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Correspondence to A. S. Mokrushin.

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Translated by V. Glyanchenko

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Mokrushin, A.S., Gorban, Y.M., Nagornov, I.A. et al. Effect of the Conditions of the AACVD Synthesis of Thin Nanostructured ZnO Films on Their Microstructural, Optical, and Gas-Sensing Characteristics. Russ. J. Inorg. Chem. 67, 2099–2107 (2022). https://doi.org/10.1134/S0036023622601520

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