Abstract
An original transmission line pulse setup has been presented. This test setup allows to measure quasi-static I–V curves of the semiconductor devices and electrostatic discharge protection and investigate the electrostatic discharge robustness of the integrated circuits. The setup allows to perform both destructive and nondestructive tests. The designed test setup allows to perform transmission line pulse test using 100 ns pulse with current peak value up to 10 A according to the IEC62615 international standard.
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig1_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig2_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig3_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig4_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig5_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig6_HTML.png)
![](http://media.springernature.com/m312/springer-static/image/art%3A10.1134%2FS0020441224700453/MediaObjects/10786_2024_8800_Fig7_HTML.png)
REFERENCES
Semkin, N.D., Voronov, K.E., Il’in, A.B., Piyakov, A.V., Shatrov, S.A., and Plokhotnichenko, P.G., Instrum. Exp. Tech., 2017, vol. 60, no. 2, pp. 258–265. https://doi.org/10.1134/S0020441217010274
Abrameshin, A.E., Galukhin, I.A., Kechiev, L.N., Kuznetsov, V.V., and Nazarov, R.V., Tekhnol. Elektromagn. Sovmestimosti, 2012, no. 3, p. 44.
Voldman, S.H., Proc. 9th Int. Conf. on Solid-State and Integrated-Circuit Technology, Bei**g, 2008, p. 325. https://doi.org/10.1109/ICSICT.2008.4734537
Ammer, M., Esmark, K., zur Nieden, F., Rupp, A., Cao, Y., Sauter, M., and Maurer, L., Proc. 39th Electrical Overstress/Electrostatic Discharge Symp. (EOS/ESD), Tucson, 2017, p. 1. https://doi.org/10.23919/EOSESD.2017.8073438
Naumov, V.V., Grebenshchikov, O.A., and Zalesskii, V.B., Prib. Tekh. Eksp., 2007, no. 1, p. 164.
Barth, J.E., Verhaege, K., Henry, L.G., and Richner, J., IEEE Trans. Electron. Packag. Manuf., 2001, vol. 24, p. 99. https://doi.org/10.1109/6104.930960
Ashton, R.A., Proc. Int. Conf. on Microelectronic Test Structures, Nara, 1995, p. 127. https://doi.org/10.1109/ICMTS.1995.513959
V’yukhin, V.N., Instrum. Exp. Tech., 2020, vol. 63, no. 1, pp. 46–49. https://doi.org/10.1134/S0020441219060216
Du, F., Song, S., Hou, F., Song, W., Chen, L., Liu, J., and Liou, J.J., IEEE Electron. Device Lett., 2019, vol. 40, p. 1491. https://doi.org/10.1109/LED.2019.2926103
Teh, G.L. and Chim, W.K., Proc. 6th Int. Symp. on the Physical and Failure Analysis of Integrated Circuits, Singapore, 1997, p. 156. https://doi.org/10.1109/IPFA.1997.638186
Kuznetsov, V., IEEE Trans. Electromagn. Compat., 2018, vol. 60, p. 107. https://doi.org/10.1109/TEMC.2017.2700492
Maksimov, I.V., Kuznetsov, V.V., and Andreev, V.V., Tekhnol. Elektromagn. Sovmestimosti, 2017, no. 4(63), p. 35.
Andreev, D.V., Maslovsky, V.M., Andreev, V.V., and Stolyarov, A.A., Phys. Status Solidi A, 2022, vol. 219, p. 2100400. https://doi.org/10.1002/pssa.202100400
Funding
The work was supported by the Russian Ministry of education and Science withing the framework of the State Contract № FSFN-2024-0027.
Author information
Authors and Affiliations
Corresponding authors
Ethics declarations
The authors of this work declare that they have no conflicts of interest.
Additional information
Publisher’s Note.
Pleiades Publishing remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Kuznetsov, V.V., Andreev, V.V. Transmission Line Pulse Setup for Electrostatic Discharge Robustness Testing of the Semiconductor Devices. Instrum Exp Tech 67, 268–273 (2024). https://doi.org/10.1134/S0020441224700453
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020441224700453