Abstract
The design of a microwave system, the user interface, and the basic characteristics of noncontact equipment for measuring the recombination lifetime of free charge carriers in semiconductor materials by the photoconductivity-decay method are described. The features of the microwave-system design eliminate the need for a microwave circulator and other expensive elements of the systems without a loss in the equipment sensitivity. This substantially simplifies the design and provides automated measurements of the free-carrier lifetime in silicon single crystals in a range of 0.2 μs to tens of milliseconds. The upper measurement limit is determined by the geometrical dimensions of a sample and the surface treatment quality. The results of measuring the photoconductivity relaxation time in reference single-crystal silicon samples are presented.
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References
Batavin, V.V., Kontsevoi, Yu.A., and Fedorovich, Yu.V., Izmerenie parametrov poluprovodnikovykh materialov i struktur (Measurement of the Parameters of Semiconductor Materials and Structures), Moscow: Radio i Svyaz’, 1985.
Runyan, W.R. and Shaffner, T.J., Semiconductor Measurements and Instrumentation, New York: McGraw-Hill, 1997.
Khanna, V.K., Progress Quant. Electron., 2005, vol. 29, no. 2, p. 59. doi 10.1016/j.pquantelec.2005.01.002
Gaubas, E., Vanhellemont, J., Sinoen, E., Romandic, I., Geens, W., and Clauws, P., Phys. B–Condens. Matter, 2007, vol. 401, p. 222. doi 10.1016/j.physb.2007.08.151
Goryunov, N.N., Kobeleva, S.P., Charykov, N.A., Lukashov, N.V., and Slesarev, V.N., Zavod. Lab., Diagn. Mater., 2004, vol. 70, no. 5, p. 27.
SEMI M F1535-0707, SEMI Annual Book. 2007, p. 8274.
SEMI M F28-0707, SEMI Annual Book. 2007, p. 7762.
Borodovskij, P.A. and Buldygin, A.F., Prib. Tekh. Eksp., 1995, no. 6, p. 799.
Akhmanaev, V.B., Lisyuk, Yu.V., Medvedev, Yu.V., and Petrov, A.S., Russ. Phys. J., 1983, vol. 26, no. 6, p. 569. doi 10.1007/BF00891934
www.fractal.com.ru
Anfimov, I.M., Kobeleva, S.P., and Schemerov, I.V., Inorgan. Mater., 2015, vol. 51, no. 15, p. 1447. doi 10.1134/S0020168515150029
Yurchuk, S.Yu. and Kobeleva, S.P., Svidetel’stvo o gos. registratsii programmy dlya EVM no. 2013612971 (Certificate on State Registration of a Program for Computers, no. 2013612971), 2013.
SEMI MF 391-1106, SEMI Annual Book, 2007, p. 7884.
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Original Russian Text © S.P. Kobeleva, I.M. Anfimov, I.V. Schemerov, 2016, published in Pribory i Tekhnika Eksperimenta, 2016, No. 3, pp. 91–95.
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Kobeleva, S.P., Anfimov, I.M. & Schemerov, I.V. A device for free-carrier recombination lifetime measurements. Instrum Exp Tech 59, 420–424 (2016). https://doi.org/10.1134/S0020441216030064
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DOI: https://doi.org/10.1134/S0020441216030064