Abstract
The luminescence properties of p-and n-type InAs layers grown by gas-phase epitaxy from metallorganic compounds at atmospheric pressure are investigated. Acceptor levels in InAs are identified with energies 350, 372, 387, and 397 meV. Optimal conditions are determined for the growth of InAs layers in a reactor of planetary type. At a growth temperature of 565 °C, InAs structures were obtained with abrupt p-n junctions. The structures grown were used to make light-emitting diodes operating at wavelengths of 3.1 µm (T=77 K) and 3.7 µm (T=300 K).
Similar content being viewed by others
References
B. Baliga and K. Ghanghi, J. Electrochem. Soc. 121, 1642 (1974).
T. Fukui and Y. Horikoshi, Jpn. J. Appl. Phys. 18, 2157 (1979).
T. Fukui and Y. Horikoshi, Jpn. J. Appl. Phys. 19, 551 (1980).
T. Fukui and Y. Horikoshi, Jpn. J. Appl. Phys. 20, 587 (1981).
S. Haywood, R. Martin, N. Mason, and P. Walker, J. Cryst. Growth 97, 489 (1989).
S. Haywood, R. Martin, N. Mason, and P. Walker, J. Electron. Mater. 8, 783 (1990).
D. Partin, L. Green, D. Morelli, J. Heremans, B. Fuller, and C. Thrush, J. Electron. Mater. 20, 1109 (1991).
Y. Iwamura, H. Shigeta, and N. Watanabe, Jpn. J. Appl. Phys. 32, 368 (1991).
K. Huang, Yu Hsu, R. Cohen, and G. Stringfellow, J. Cryst. Growth 156, 311 (1995).
S. Watkins, C. Tran, R. Ares, and G. Soerensen, Appl. Phys. Lett. 66, 882 (1995).
R. Egan, T. Tansley, and V. Chin, J. Cryst. Growth 147, 19 (1995).
C. von Eichel-Streiber, M. Behet, M. Heuken, and K. Heime, J. Cryst. Growth 170, 783 (1997).
Y. Iwamura, K. Masubuchi, M. Noya, and N. Watanabe, Abstracts of Mid-Infrared Optoelectronics Material and Devices, Second International Conference (1998), p. 10.
Z. Fang, K. Ma, R. Cohen, and G. Stringfellow, Appl. Phys. Lett. 59, 1446 (1991).
Y. Lacroix, S. Watkins, C. Tran, and M. Thewalt, Appl. Phys. Lett. 66, 1101 (1995).
N. Buchan, C. Larsen, and G. Stringfellow, J. Cryst. Growth 92, 605 (1988).
O. A. Allaberenov, N. V. Zotova, D. N. Nasledov, and L. D. Neuımina, Fiz. Tekh. Poluprovodn. 4, 1939 (1970) [Sov. Phys. Semicond. 4, 1662 (1970)].
H. Ito and T. Ishibashi, Mater. Res. Soc. Symp. Proc. 163 887 (1989).
J. Huang, J. Ryan, K. Bray, and T. Kuech, J. Electron. Mater. 24, 1539 (1995).
C. Goo, W. Lau, T. Chong, L. Tan, and P. Chu, Appl. Phys. Lett. 68, 841 (1996).
S. S. Kizhaev, M. P. Mikhaılova, S. S. Molchanov, S. S. Stoyanov, and Yu. P. Takovlev, Pis’ma Zh. Tekh. Fiz. 24(4), 1 (1998) [Tech. Phys. Lett. 24, 247 (1998)].
Author information
Authors and Affiliations
Additional information
Fiz. Tekh. Poluprovodn. 33, 1168–1172 (October 1999)
Rights and permissions
About this article
Cite this article
Voronina, T.I., Zotova, N.V., Kizhayev, S.S. et al. Luminescence properties of InAs layers and p-n structures grown by metallorganic chemical vapor deposition. Semiconductors 33, 1062–1066 (1999). https://doi.org/10.1134/1.1187865
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1134/1.1187865