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Determination of residual stress in PZT thin film prepared by pulsed laser deposition

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Institute of Fundamental Mechanics and Material Engineering, **angtan University, **angtan, Hunan, 411105, People's Republic of China

    Z. Y. Yang, Y. C. Zhou, X. J. Zheng & Z. Yan

  2. Environmental Geochemistry Laboratory, Department of Geoscience and Technology, Tohoku University, Aoba 01, Aramaki, Aoba-ku, Sendai, 980-8579, Japan

    G. Bignall

Authors
  1. Z. Y. Yang
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  2. Y. C. Zhou
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  3. X. J. Zheng
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  4. Z. Yan
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  5. G. Bignall
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Correspondence to Y. C. Zhou.

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Yang, Z.Y., Zhou, Y.C., Zheng, X.J. et al. Determination of residual stress in PZT thin film prepared by pulsed laser deposition. Journal of Materials Science Letters 21, 1541–1544 (2002). https://doi.org/10.1023/A:1020008817628

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