Abstract
Constructing unique nanoscale structures by atomic manufacturing techniques may be an effective route to improve the mechanical properties of metallic glass (MG) thin films (TFs). Here, using magnetron sputtering and pulsed laser deposition (PLD) as atomic manufacturing strategies, we prepared two types of Ta-based MG TFs with a dual-phase structure. It was found that the PLD-TF presents a finer nanostructure of small-sized nanocrystals α-Ta (1–4 nm) diffusely dispersed on amorphous matrixes, resulting in an ultrahigh yield strength of 7.99 GPa and a high hardness of 15.87 GPa when compressed, accompanied with a large plasticity of 80%. The interaction between the nanocrystallines and the MG matrix leads to the formation of multiple shear bands, which contribute to the high plasticity and strength. These results indicate that the atomic manufacturing method is beneficial to directly regulating the microstructure and microconfiguration of TF materials, and further optimizing their performance. This work provides a practical approach to break the strength-plasticity trade-off dilemma in metallic materials through atomic-level structural design.
![](http://media.springernature.com/lw685/springer-static/image/art%3A10.1007%2Fs40843-023-2510-5/MediaObjects/40843_2023_2510_Fig1_HTML.png)
摘要
通过原子制造技术构建独特的纳米尺度结构可能是改善金属玻璃(MG)薄膜机械性能的有效途径. 在此, 我们使用脉冲激光沉积作为原子制造策略, 制备了一种Ta基金属玻璃. TaNi MG具有小尺寸纳米晶体(1–4 纳米)弥散在非晶基体上的双相纳米结构, 因此在压缩过程中表现出7.99 GPa的超高屈服**度和15.87 GPa的高硬度, 并伴有80%的大塑性. 纳米晶体和MG基体之间的相互作用, 导致了多个剪切带的形成, 从而贡献了高塑性和**度. 研究发现, 原子制造方法有利于直接调控薄膜材料的微观结构和微观构型, 并进一步优化其性能. 这项工作为通过原子尺度的结构设计来打破金属材料的**度-塑性权衡提供了一个实 用的方法.
References
Li HX, Lu ZC, Wang SL, et al. Fe-based bulk metallic glasses: Glass formation, fabrication, properties and applications. Prog Mater Sci, 2019, 103: 235–318
Hu G, Liu W. Nano/micro-electro mechanical systems: A patent view. J Nanopart Res, 2015, 17: 465
Gleiter H. Nanoglasses: A new kind of noncrystalline material and the way to an age of new technologies? Small, 2016, 12: 2225–2233
Li FC, Wang TY, He QF, et al. Micromechanical mechanism of yielding in dual nano-phase metallic glass. Scripta Mater, 2018, 154: 186–191
Wu Y, **ao Y, Chen G, et al. Bulk metallic glass composites with transformation-mediated work-hardening and ductility. Adv Mater, 2010, 22: 2770–2773
Liu YH, Wang G, Wang RJ, et al. Super plastic bulk metallic glasses at room temperature. Science, 2007, 315: 1385–1388
Ketov SV, Sun YH, Nachum S, et al. Rejuvenation of metallic glasses by non-affine thermal strain. Nature, 2015, 524: 200–203
Kumar G, Desai A, Schroers J. Bulk metallic glass: The smaller the better. Adv Mater, 2011, 23: 461–476
Yao Y, Huang Z, **e P, et al. Carbothermal shock synthesis of high-entropy-alloy nanoparticles. Science, 2018, 359: 1489–1494
Zhang D, Qiu D, Gibson MA, et al. Additive manufacturing of ultra-fine-grained high-strength titanium alloys. Nature, 2019, 576: 91–95
Zhang JY, Zhou ZQ, Zhang ZB, et al. Recent development of chemically complex metallic glasses: From accelerated compositional design, additive manufacturing to novel applications. Mater Futures, 2022, 1: 012001
Garcia R, Knoll AW, Riedo E. Advanced scanning probe lithography. Nat Nanotech, 2014, 9: 577–587
Zhu FF, Chen WJ, Xu Y, et al. Epitaxial growth of two-dimensional stanene. Nat Mater, 2015, 14: 1020–1025
Lu J, Fu B, Kung MC, et al. Coking- and sintering-resistant palladium catalysts achieved through atomic layer deposition. Science, 2012, 335: 1205–1208
Zhou J, Liu X, Li XS, et al. High-temperature malleable Ta-Co metallic glass developed by combinatorial method. Scripta Mater, 2022, 219: 114883
Pergolesi D, Fabbri E, D’Epifanio A, et al. High proton conduction in grain-boundary-free yttrium-doped barium zirconate films grown by pulsed laser deposition. Nat Mater, 2010, 9: 846–852
Chen FR, van Dyck D, Kisielowski C. In-line three-dimensional holography of nanocrystalline objects at atomic resolution. Nat Commun, 2016, 7: 10603
Zhou J, Yang Y, Yang Y, et al. Observing crystal nucleation in four dimensions using atomic electron tomography. Nature, 2019, 570: 500–503
Khanna SN, Jena P. Assembling crystals from clusters. Phys Rev Lett, 1992, 69: 1664–1667
Wu G, Chan KC, Zhu L, et al. Dual-phase nanostructuring as a route to high-strength magnesium alloys. Nature, 2017, 545: 80–83
Zhao R, Jiang HY, Luo P, et al. Sampling stable amorphous tantalum states from energy landscape. Scripta Mater, 2021, 202: 114018
Luo P, Cao CR, Zhu F, et al. Ultrastable metallic glasses formed on cold substrates. Nat Commun, 2018, 9: 1389
Liu SF, Hou ZW, Lin L, et al. 3D nanoprinting of semiconductor quantum dots by photoexcitation-induced chemical bonding. Science, 2022, 377: 1112–1116
Bae JW, Lim JW, Mimura K, et al. Ion beam deposition of α-Ta films by nitrogen addition and improvement of diffusion barrier property. Thin Solid Films, 2007, 515: 4768–4773
Diyatmika W, Chu JP, Kacha BT, et al. Thin film metallic glasses in optoelectronic, magnetic, and electronic applications: A recent update. Curr Opin Solid State Mater Sci, 2015, 19: 95–106
Yan H, Santoso RN, Jiang Y, et al. Effect of oxygen concentration on the thermal stability of magnetron sputtered amorphous Ta-Ni thin films. Thin Solid Films, 2012, 520: 2356–2361
Chen GS, Chen ST. Diffusion barrier properties of single- and multi-layered quasi-amorphous tantalum nitride thin films against copper penetration. J Appl Phys, 2000, 87: 8473–8482
Oliver WC, Pharr GM. Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J Mater Res, 2004, 19: 3–20
Lai JJ, Lin YS, Chang CH, et al. Promising Ta-Ti-Zr-Si metallic glass coating without cytotoxic elements for bio-implant applications. Appl Surf Sci, 2018, 427: 485–495
Meng D, Yi J, Zhao DQ, et al. Tantalum based bulk metallic glasses. J Non-Crystalline Solids, 2011, 357: 1787–1790
Neilson HJ, Petersen AS, Cheung AM, et al. Weibull modulus of hardness, bend strength, and tensile strength of Ni-Ta-Co-X metallic glass ribbons. Mater Sci Eng-A, 2015, 634: 176–182
Zhang W, Arai K, Qin C, et al. Formation and properties of new Ni-Ta-based bulk glassy alloys with large supercooled liquid region. Mater Sci Eng-A, 2008, 485: 690–694
Chen PS, Chen HW, Duh JG, et al. Characterization of mechanical properties and adhesion of Ta-Zr-Cu-Al-Ag thin film metallic glasses. Surf Coatings Tech, 2013, 231: 332–336
Zhao H, Sun F, Li X, et al. Ultrastability of metallic supercooled liquid induced by vibration. Scripta Mater, 2021, 194: 113606
Qin W, Fu L, **e T, et al. Abnormal hardness behavior of Cu-Ta films prepared by magnetron sputtering. J Alloys Compd, 2017, 708: 1033–1037
Uğur Ş, Güler M, Uğur G, et al. Elastic, mechanical, optical and magnetic properties of Ru2MnX (X = Nb, Ta, V) Heusler alloys. J Magn Magn Mater, 2021, 523: 167614
Sanin VV, Kaplansky YY, Aheiev MI, et al. Structure and properties of heat-resistant alloys NiAl-Cr-Co-X (X = La, Mo, Zr, Ta, Re) and fabrication of powders for additive manufacturing. Materials, 2021, 14: 3144
Hu J, Sun W, Jiang Z, et al. Indentation size effect on hardness in the body-centered cubic coarse-grained and nanocrystalline tantalum. Mater Sci Eng-A, 2017, 686: 19–25
Sinha AK, Soni VK, Chandrakar R, et al. Influence of refractory elements on mechanical properties of high entropy alloys. Trans Ind Inst Met, 2021, 74: 2953–2966
Wei MZ, Cao ZH, Shi J, et al. Anomalous plastic deformation in nanoscale Cu/Ta multilayers. Mater Sci Eng-A, 2014, 598: 355–359
Tian L, Cheng YQ, Shan ZW, et al. Approaching the ideal elastic limit of metallic glasses. Nat Commun, 2012, 3: 609
Wang WH. Elastic moduli and behaviors of metallic glasses. J Non-Crystalline Solids, 2005, 351: 1481–1485
Yu CY, Sun PL, Kao PW, et al. Mechanical properties of submicron-grained aluminum. Scripta Mater, 2005, 52: 359–363
Schuh CA, Lund AC. Atomistic basis for the plastic yield criterion of metallic glass. Nat Mater, 2003, 2: 449–452
Luo Q, Cui W, Zhang H, et al. Polyamorphism mediated by nanoscale incipient concentration wave uncovering hidden amorphous intermediate state with ultrahigh modulus in nanostructured metallic glass. Mater Futures, 2023, 2: 025001
Schuh CA, Hufnagel TC, Ramamurty U. Mechanical behavior of amorphous alloys. Acta Mater, 2007, 55: 4067–4109
Sarac B, Schroers J. Designing tensile ductility in metallic glasses. Nat Commun, 2013, 4: 2158
Sarac B, Ivanov YP, Chuvilin A, et al. Origin of large plasticity and multiscale effects in iron-based metallic glasses. Nat Commun, 2018, 9: 1333
Wu G, Liu C, Sun L, et al. Hierarchical nanostructured aluminum alloy with ultrahigh strength and large plasticity. Nat Commun, 2019, 10: 5099
Zhou J, Wang Q, Zeng Q, et al. A plastic FeNi-based bulk metallic glass and its deformation behavior. J Mater Sci Tech, 2021, 76: 20–32
Acknowledgements
This work was financially supported by Guangdong Basic and Applied Basic Research, China (2019B1515130005, 2020B1515130007, 2021B1515140005, and 2022A1515010347), Guangdong Major Project of Basic and Applied Basic Research, China (2019B030302010), the National Natural Science Foundation of China (52071222, 61888102, and 52101191), the National Key Research and Development Program of China (2021YFA0716302), the Program for the Experiments for Space Exploration from Qian Xuesen Laboratory, China Academy of Space Technology (TKTSPY-2020-03-02).
Author information
Authors and Affiliations
Contributions
Author contributions Ke HB and Wang WH designed and supervised the work. Zhao H and Liu X conducted the experiments. Zhao H and Zhou J performed the data analysis and wrote the draft of this manuscript. Wang WH, Ke HB, Zhou J and Zhao H revised the paper. All the authors include Shang BS, Ding Y, Sun BA, Zhang B and Bai HY contributed to the discussion and interpretation of the results.
Corresponding author
Ethics declarations
Conflict of interest The authors declare that they have no conflict of interest.
Additional information
Hang Zhao is a PhD candidate in atomic and molecular physics at Liaoning University and Songshan Lake Materials Laboratory, supervised by Professor Wei-Hua Wang and Professor Hai-Bo Ke. His research focuses on the relationship between structures and ultimate properties of amorphous alloys.
**g Zhou received his PhD degree from the Southeast University in 2020. He then completed his post-doctoral work at **’an Jiaotong University. He is currently an associate research fellow at Songshan Lake Materials Laboratory. His research interests focus on the development and application of amorphous alloys with ultimate properties.
Hai-Bo Ke received his PhD degree from the Institute of Physics, Chinese Academy of Sciences in 2012, and then served as a visiting scholar at the City University of Hong Kong. He is currently a researcher at Songshan Lake Materials Laboratory. His research interests focus on the physical nature and application of amorphous alloys.
Rights and permissions
About this article
Cite this article
Zhao, H., Zhou, J., Liu, X. et al. High-strength and malleable dual-phase nanostructured Ta-based metallic glass via atomic manufacturing. Sci. China Mater. 66, 4226–4232 (2023). https://doi.org/10.1007/s40843-023-2510-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40843-023-2510-5