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Voltage Controlled Tunable MOEMS Optical Ring Resonator

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Abstract

This study aimed at designing a tunable ring resonator based on Micro-Electromechanical Systems (MOEMS) for exploring optical application. Optical Ring Resonator (ORR) represents central resonance wavelength of 1.55 μm that is located on the SiC circular diaphragm with 7 μm radius. Adjustment of resonant wavelength is done through voltage. To achieve this goal, two very thin circular gold layers with 50 nm air gap spacing deposited under the diaphragm. When an input DC voltage applied, Electrostatic - absorbing force formed between two electrodes. Consequentlythe diaphragm is bended and an internal stress formed. This in turn alters the resonator refractive index due to the photo elastic effect and thus shifts its resonance wavelength. COMSOL Multi physics and MATLAB carried out to verify FEA and numerical analysis of the designed structure, respectively. A remarkable agreement between the simulations and analytical results achieved. By applying a variable DC voltage between ONE and 5 V with a step of 1 V, variable wavelengths in 1.55 adjacent are resulted. ORR with tuning wavelength obtained.

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In case of no conflict of interest, any materials and data that are reasonably requested by others are available to members of the scientific community for noncommercial purposes.

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In case of no conflict of interest, the code that are reasonably requested by others are available to members of the scientific community for noncommercial purposes.

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Authors and Affiliations

  1. Department of Electrical Engineering, Yadegar-e-Imam Khomeini (RAH) Shahr-e-Rey Branch, Islamic Azad University, Tehran, Iran

    Sasan Mohammadian & Farshad Babazadeh

  2. Faculty of Electrical Engineering, Shahid Beheshti University, Tehran, Iran

    Kambiz Abedi

Authors
  1. Sasan Mohammadian
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  2. Farshad Babazadeh
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  3. Kambiz Abedi
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Contributions

All authors contributed to the study conception and design. Initial investigation, data collection and analysis were performed by Sasan Mohammadian, Farshad Babazadeh and Kambiz Abedi. The first draft of the manuscript was written by Sasan Mohammadian and all authors commented on previous versions of the manuscript. All authors read, discussed, simulated and approved the final manuscript.

Corresponding author

Correspondence to Farshad Babazadeh.

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This research is a simulation study and there is no ethics to declare.

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This research is a simulation study and there is no “Consent to participate” to declare- Not applicable.

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I, Farshad Babazadeh and on behalf of the other author Kambiz Abedi, give my consent for the publication of identifiable details, which can include figures and details within the text and the whole manuscript to be published in the journal of Silicon.

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Mohammadian, S., Babazadeh, F. & Abedi, K. Voltage Controlled Tunable MOEMS Optical Ring Resonator. Silicon 15, 2287–2295 (2023). https://doi.org/10.1007/s12633-022-02164-x

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  • DOI: https://doi.org/10.1007/s12633-022-02164-x

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