Abstract
In this research, we investigated the structural, electrical, and sensing characteristics of undoped and doped TiO2 thin films prepared through the spray pyrolysis technique, using titanium tetrachloride as the precursor material. The thin films were deposited on quartz and silicon substrates, maintaining a substrate temperature of 350 ºC, and subjected to annealing at 550 ºC for 120 min. X-ray diffraction (XRD) analysis revealed the polycrystalline nature of the films, and the crystallite size was calculated using Scherrer's formula. Nickel-doped titanium oxide thin films were also fabricated, varying the do** concentrations (Ni/Ti = 0%, 1%, 2%, 3%, 4%, and 5%), deposited on quartz substrates via the spray pyrolysis technique. The impact of do** on the structural and optical properties was explored, with X-ray diffraction indicating polycrystalline thin films exhibiting an anatase phase structure. Optical analysis demonstrated a reduction in the optical band gap with increasing do** concentration in TiO2 thin films.
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On request, the corresponding author will provide you with the data sets generated during this investigation.
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The authors are thankful for the computing resources of the Universite d’Angers, Laboratory Moltech Anjou and in Angers, France and University of Technology- Iraq of Iraq.
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S. A., M. R. and Z. A.; methodology, S. A., M. R. and Z. A.; planned and conducted the tests, S. A. and M. R.; data analysis and interpretation, and M. R. and S. A.; prepared the manuscript. All authors have read and approved the final manuscript version.
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AL-Jawad, S.M.H., RASHEED, M. & Abbas, Z.Y. Effect of do** on the structural, optical and electrical properties of TiO2 thin films for gas sensor. J Opt (2024). https://doi.org/10.1007/s12596-024-01913-y
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DOI: https://doi.org/10.1007/s12596-024-01913-y