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Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

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An Erratum to this article was published on 01 December 2022

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Abstract

The consumer demand for emerging technologies such as augmented reality (AR), autopilot, and three-dimensional (3D) internet has rapidly promoted the application of novel optical display devices in innovative industries. However, the micro/nanomanufacturing of high-resolution optical display devices is the primary issue restricting their development. The manufacturing technology of micro/nanostructures, methods of display mechanisms, display materials, and mass production of display devices are major technical obstacles. To comprehensively understand the latest state-of-the-art and trigger new technological breakthroughs, this study reviews the recent research progress of master molds produced using nanoimprint technology for new optical devices, particularly AR glasses, new-generation light-emitting diode car lighting, and naked-eye 3D display mechanisms, and their manufacturing techniques of master molds. The focus is on the relationships among the manufacturing process, microstructure, and display of a new optical device. Nanoimprint master molds are reviewed for the manufacturing and application of new optical devices, and the challenges and prospects of the new optical device diffraction grating nanoimprint technology are discussed.

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Acknowledgements

This work was supported by the Fundamental Key Research Project of Shenzhen (Grant No. JCYJ20210324115806017), the Innovation and Entrepreneurship Project for Overseas High-Level Talents of Shenzhen (Grant No. KQJSCX20180328095603847), the National Natural Science Foundation of China (Grant No. 51805331), and the National Key R&D Program of China (Grant No. 6142005180401).

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Authors and Affiliations

  1. Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen, 518060, China

    Yuhang Liu, Jianjun Lin, Bingyang Wang, Liuyi Wang, Zhiyuan Pan, Jianfei Jia, Dengji Guo & Xu** Wang

  2. Shenzhen Silver Basis Technology Co., Ltd., Shenzhen, 518108, China

    Zuohuan Hu, Guoli Gao & Qinwei Yin

  3. Institute of Microelectronics, Shenzhen University, Shenzhen, 518060, China

    Dengji Guo & Xu** Wang

  4. Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, 518060, China

    Jianjun Lin & Dengji Guo

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  1. Yuhang Liu
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  2. Jianjun Lin
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  3. Zuohuan Hu
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  4. Guoli Gao
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  5. Bingyang Wang
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  7. Zhiyuan Pan
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  8. Jianfei Jia
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  9. Qinwei Yin
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  10. Dengji Guo
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  11. Xu** Wang
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Contributions

D.G. conceived of the main conceptual ideas and proof outline. X.W. supervised the project. Y.L. & J.L. drafted the manuscript and figures with input from Z.H., G.G., B.W., L.W., Z.P., J.J. and Q.Y. All authors approved the final version of the manuscript.

Corresponding authors

Correspondence to Dengji Guo or Xu** Wang.

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Liu, Y., Lin, J., Hu, Z. et al. Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices. Front. Mater. Sci. 16, 220596 (2022). https://doi.org/10.1007/s11706-022-0596-6

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