SpringerLink
Log in

Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method

  • Published:
Journal of Electroceramics Aims and scope Submit manuscript

Abstract

We studied the effects of rapid thermal annealing in different ambients on the structural, electrical and optical properties of the sol-gel derived ZnO thin films. All the films after annealing showed highly degree of (002) oriented in the X-ray diffractometry (XRD) patterns. The effects of annealing ambients on electrical properties of the films were studied. Carrier concentration, resistivity and mobility were found to be distinguished after annealed in different ambients. The sample with the lowest resistivity of 0.095 Ω·cm and the largest mobility of 105.1 cm2/v·s was achieved after annealing in vacuum. XPS results indicated that more oxygen vacancies existed on the ZnO surface when annealed in vacuum than that in O2.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price includes VAT (Brazil)

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. S.A.M. Lima, M.R. Davolos, W.G. Quirino, C. Legnani, M. Cremona, Appl. Phys. Lett. 90, 023503 (2007)

    Article  Google Scholar 

  2. C.R. Kim, J.Y. Lee, C.M. Shin, J.Y. Leem, H. Ryu, J.H. Chang, H.C. Lee, C.S. Son, W.J. Lee, W.G. Jung, S.T. Tan, J.L. Zhao, X.W. Sun, Solid State Commun. 148, 395 (2008)

    Article  CAS  Google Scholar 

  3. B.Y. Oh, M.C. Jeong, T.H. Moon, W. Lee, J.M. Myoung, J.Y. Hwang, D.S. Seo, J. Appl. Phys. 99, 124505 (2006)

    Article  Google Scholar 

  4. P. Sagar, P.K. Shishodia, R.M. Mehra, Appl. Surf. Sci. 253, 5419 (2007)

    Article  CAS  Google Scholar 

  5. D.S. Liu, C.S. Sheu, C.T. Lee, J. Appl. Phys. 102, 033516 (2007)

    Article  Google Scholar 

  6. V.R. Shinde, T.P. Gujar, C.D. Lokhande, Sol. Energy Mater. Sol. Cells 91, 1055 (2007)

    Article  CAS  Google Scholar 

  7. C.C. Chen, B.H. Yu, J.F. Liu, Q.R. Dai, Y.F. Zhu, Mater. Lett. 61, 2961 (2007)

    Article  CAS  Google Scholar 

  8. H.Y. Tsai, J. Mater. Process. Technol. 192, 55 (2007)

    Article  Google Scholar 

  9. R. Ghosh, G.K. Paul, D. Basak, Mater. Res. Bull. 40, 1905 (2005)

    Article  CAS  Google Scholar 

  10. K.M. Lin, Y.Y. Chen, J. Sol-Gel Sci. Technol. 51, 215 (2009)

    Article  CAS  Google Scholar 

  11. S.Y. Hu, Y.C. Lee, J.W. Lee, J.C. Huang, J.L. Shen, W. Water, Appl. Surf. Sci. 254, 1578 (2008)

    Article  CAS  Google Scholar 

  12. Y.C. Lee, S.Y. Hu, W. Water, K.K. Tiong, Z.C. Feng, Y.T. Chen, J.C. Huang, J.W. Lee, C.C. Huang, J.L. Shen, M.H. Cheng, J. Lumin. 129, 148 (2009)

    Article  CAS  Google Scholar 

  13. X.Q. Wei, B.Y. Man, M. Liu, C.S. Xue, H.Z. Zhuang, C. Yang, Phys. B 388, 145 (2007)

    Article  CAS  Google Scholar 

  14. K.M. Lin, P. Tsai, Thin Solid Films 515, 8601 (2007)

    Article  CAS  Google Scholar 

  15. B.X. Lin, Z.X. Fu, Y.B. Jia, Appl. Phys. Lett. 79, 943 (2001)

    Article  CAS  Google Scholar 

  16. C. Li, M. Furuta, T. Matsuda, T. Hiramatsu, H. Furuta, T. Hirao, Thin Solid Films 517, 3265 (2009)

    Article  CAS  Google Scholar 

  17. M. Chen, X. Wang, Y.H. Yu, Z.L. Pei, X.D. Bai, C. Sun, R.F. Huang, L.S. Wen, Appl. Surf. Sci. 158, 134 (2000)

    Article  CAS  Google Scholar 

  18. X.J. Yang, X.Y. Miao, X.L. Xu, C.M. Xu, J. Xu, H.T. Liu, Opt. Mater. 27, 1602 (2005)

    Article  CAS  Google Scholar 

Download references

Acknowledgment

This work was supported by the “Hundred Talents Program,” the Chinese Academy of Sciences, the Zhejiang Natural Science Foundation (Y407364), and the Ningbo Natural Science Foundation (No. 2007A610027, No. 2008A610047, No. 2009A610018). The authors would give thanks to the all measurers of XRD, SEM, XPS and UV-Vis absorption spectroscopy of Ningbo institute of material technology & engineering Chinese academy of Science.

Author information

Authors and Affiliations

  1. Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, People’s Republic of China

    Jia Li, **-Hua Huang, Yu-Long Zhang, Ye Yang & Wei-Jie Song

  2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, People’s Republic of China

    Jia Li & **ao-Min Li

Authors
  1. Jia Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. **-Hua Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yu-Long Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ye Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Wei-Jie Song
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. **ao-Min Li
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Wei-Jie Song.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Li, J., Huang, JH., Zhang, YL. et al. Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method. J Electroceram 26, 84–89 (2011). https://doi.org/10.1007/s10832-011-9632-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10832-011-9632-0

Keywords

Search

Navigation