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A low-cost method of fabricating Parylene-SU-8 micro-nanofluidic chip by thermal nanoimprint and multilayer compositing

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Abstract

A new fabrication of micro-nano fluidic chips by thermal nanoimprint and multilayer compositing is proposed. The nano-channels with different aspect ratios were first manufactured by thermal nanoimprinting and Parylene layer coating, and the effect of parylene layer thickness on aspect ratio is studied. Then SU-8 layers with the micro channels and liquid reservoirs were superposed by ultraviolet exposure and secondary bonding to form a multilayer micro-nano fluidic chip. By optimizing the bonding parameters, a Parylene-SU-8 micro-nano fluidic chip with 200 μm wide and 8 μm deep micro-channels, cross-linked with 78 nm wide and 288 nm deep nano-channels was constructed, of which the maximum bonding strength is 0.92 MPa. This method has the advantages of simple process and low cost, which is suitable for mass manufacturing of micro-nano fluidic chips.

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Acknowledgements

This work is supported by Excellent Postdoctoral Program of Jiangsu Province (No.2023ZB694), Shanxi Basic Research Program for Youths (No.202103021223069), State Key Laboratory of Electrical Insulation and Power Equipment (No.EIPE22206), and State Key Laboratory of Refractories and Metallurgy (No.G202202).

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Authors and Affiliations

  1. Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Electronic Information and Optical Engineering, Taiyuan University of Technology, Taiyuan, China

    Lei Sun

  2. State Key Laboratory of Electrical Insulation and Power Equipment, **’an Jiaotong University, **’an, China

    Zhifu Yin

  3. The State Key Laboratory of Refractories and Metallurgy, Wuhan University of Science and Technology, Wuhan, China

    Zhifu Yin

  4. School of Mechanical and Electrical Engineering, Soochow University, Suzhou, Jiangsu, 215137, China

    Ran Guo

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  1. Lei Sun
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  2. Zhifu Yin
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  3. Ran Guo
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Contributions

Lei Sun wrote the main manuscript text, and prepared Figs. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 and 11. Ran Guo prepared Fig. 12.Zhifu Yin modified and improved the manuscript.All authors reviewed the manuscript.

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Correspondence to Lei Sun.

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Sun, L., Yin, Z. & Guo, R. A low-cost method of fabricating Parylene-SU-8 micro-nanofluidic chip by thermal nanoimprint and multilayer compositing. Microfluid Nanofluid 28, 46 (2024). https://doi.org/10.1007/s10404-024-02743-x

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