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Absolute measurement of flats with the method of shift-rotation

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Abstract

We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is ∼0.4 nm.

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Authors and Affiliations

  1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China

    Weihong Song, Fan Wu, ** Hou, Wenchuan Zhao & Yongjian Wan

  2. University of Chinese Academy of Sciences, Bei**g, 100039, China

    Weihong Song

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  1. Weihong Song
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  2. Fan Wu
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  3. ** Hou
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  4. Wenchuan Zhao
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  5. Yongjian Wan
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Correspondence to Weihong Song.

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Song, W., Wu, F., Hou, X. et al. Absolute measurement of flats with the method of shift-rotation. OPT REV 20, 374–377 (2013). https://doi.org/10.1007/s10043-013-0067-5

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